Semiconductor Packaging Antenna Integration Warpage Control

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Solution Overview

Problem

Existing semiconductor packaging technologies face challenges with warpage, poor bonding strength, water vapor leakage, and overheating due to poor heat conductivity, especially in fan-out wafer level packaging, which affects the performance and reliability of radio frequency chips with integrated antennas.

Innovation Solution

A semiconductor packaging structure incorporating a substrate with a redistribution layer, metal bump, underfill layer, polymer layer, and an antenna module, where the substrate is made of quartz or sapphire for reduced warpage and improved heat conductivity, and the polymer layer enhances bonding strength and protects against environmental influences.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If plastic packaging process is adopted for fan-out wafer level packaging, then packaging cost is reduced and integration level is improved, but warpage control becomes difficult and bonding strength decreases

Engineering Contradiction:
Improvepackaging cost and integration levelVSAvoidwarpage control and bonding strength
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent changes the substrate material from conventional plastic to quartz glass or sapphire, fundamentally altering the thermal and mechanical parameters. This material substitution enables precise control of warpage through inherent material stability and significantly improves bonding strength through better thermal matching with the semiconductor chip, while maintaining the cost-effectiveness of the fan-out wafer level packaging process

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs composite material structures including quartz glass/sapphire substrates combined with specifically designed underfill materials and encapsulation resins. These composite structures create optimal thermal expansion matching between different layers, preventing warpage while enhancing overall bonding strength and structural reliability of the packaged device

Inventive Principle:
Principle #40Composite materials

2Device complexity

If conventional packaging materials are used, then packaging process is simple, but heat conductivity is poor leading to overheating problems

Engineering Contradiction:
Improvepackaging process complexityVSAvoidheat conductivity and overheating
Core Design Contradiction:
Device complexityVSTemperature

Solution Approach 1:

The patent fundamentally changes the thermal parameter of the packaging system by substituting plastic substrates with quartz glass or sapphire materials that possess inherently superior thermal conductivity. This parameter change enables efficient heat dissipation from the semiconductor chip through the substrate, preventing overheating while maintaining a relatively simple packaging process flow

Inventive Principle:
Principle #35Parameter changes

3Adaptability or versatility

If antennas are laid out directly on PCB or external antenna interfaces are reserved, then radio frequency function is achieved, but PCB area is increased

Engineering Contradiction:
Improveradio frequency functionVSAvoidPCB area
Core Design Contradiction:
Adaptability or versatilityVSArea of stationary object

Solution Approach 1:

The patent merges the antenna function directly into the semiconductor chip packaging structure by integrating antenna elements into the packaging substrate or encapsulation layer. This consolidation eliminates the need for separate PCB antenna layouts or external antenna interfaces, achieving full radio frequency functionality while significantly reducing the occupied PCB area

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The packaging substrate and encapsulation materials are designed to serve multiple functions simultaneously: providing mechanical support, thermal management, and integrated antenna functionality. This multi-functionality allows the same structural elements to fulfill both packaging and radio frequency communication roles, reducing overall device footprint

Inventive Principle:
Principle #6Universality (Multi-functionality)

4Stability of the object's composition

If material shrinkage or swelling occurs during packaging process, then warpage is difficult to control, but bonding strength and positioning accuracy decrease

Engineering Contradiction:
Improvedimensional stability during packagingVSAvoidbonding strength and positioning accuracy
Core Design Contradiction:
Stability of the object's compositionVSManufacturing precision

Solution Approach 1:

The patent changes the material composition from hygroscopic plastic materials to dimensionally stable quartz glass or sapphire substrates. This parameter change eliminates material shrinkage and swelling during the packaging process, maintaining consistent dimensional stability and ensuring precise bonding and positioning accuracy of the semiconductor chip and other components

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The structure effectively addresses warpage, bonding strength, and heat conductivity issues, improving the reliability and efficiency of semiconductor packaging while allowing for compact and efficient antenna integration, suitable for mass production.

Implementation Method 1

the substrate comprises a quartz glass substrate or a sapphire substrate... the heat conductivity is poor leading to overheating problems

Methodology Applied
Scientific EffectHeat conduction: Conduction (thermal)

Implementation Method 2

the polymer layer encloses the metal bump, the underfill layer and the semiconductor chip... the polymer layer enhances bonding strength and protects against environmental influences

Methodology Applied
Scientific EffectAdhesion: Adhesive

Implementation Method 3

an underfill layer filling the gap between the semiconductor chip and the redistribution layer

Methodology Applied
Scientific EffectCapillary action: Capillary Action

Data Source

PatentUS11515269B2Semiconductor packaging structure having antenna module
Publication Date: 2022.11.29 SJ SEMICONDUCTOR (JIANGYIN) CORP
  • US11515269B2 patent drawing
  • US11515269B2 patent drawing
  • US11515269B2 patent drawing

AI summary

A semiconductor packaging structure includes: a substrate, a redistribution layer having one conductive plugs, metal bumps disposed on the redistribution layer, and electrically connected with the redistribution layer including the conductive plug; a semiconductor chip over the redistribution layer and aligned to and electrically connected with the conductive plug; an underfill layer filling a gap between the redistribution layer and the semiconductor chip and the conductive plugs; a polymer layer on the redistribution layer, over the plurality of metal bumps, the underfill layer and the semiconductor chip, exposing only top parts of the plurality of metal bumps and top part of the semiconductor chip; and an antenna module disposed on the second surface of the substrate.