Semiconductor Particle Sensor With Electrostatic Cavity Concentration
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Solution Overview
Problem
Existing particle measurement devices require large housings due to the need for a sufficient volume to detect particles, limiting their applicability in spaces with tight installation constraints.
Innovation Solution
A semiconductor device with a MEMS chip and a cavity housing featuring a grating and membrane system that attracts and electrically charges particles, allowing for enhanced concentration within a miniaturized cavity, and includes electrodes and magnets to control particle adhesion and deflection for precise measurement and cleaning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a large cavity volume is used to ensure sufficient particle detection, then measurement reliability is improved, but device size increases
Solution Approach 1:
The patent changes the electrical parameters (voltage, charge state) of particles and surrounding structures to manipulate particle concentration and distribution. By applying electrical fields and charging particles, the system achieves enhanced particle concentration in a small cavity volume, resolving the contradiction between detection reliability and device size.
Solution Approach 2:
The patent replaces mechanical particle concentration methods (such as physical filtration or mechanical trapping) with electrical field-based particle manipulation. Electrophoresis and electrostatic attraction are used to concentrate and direct particles onto the detection membrane, enabling reliable detection in a miniaturized device without mechanical particle concentration mechanisms.
2Measurement precision
If particles are concentrated on the membrane for improved measurement, then measurement precision is improved, but particle contamination accumulates over time
Solution Approach 1:
The patent implements periodic reversal of electrical field directions to enable cyclic particle concentration and cleaning operations. During measurement phases, fields concentrate particles for detection; during cleaning phases, reversed fields remove accumulated particles from the membrane, allowing repeated use without permanent contamination buildup.
Solution Approach 2:
The system enables discarding of accumulated particle contamination through electrical field reversal that removes particles from the membrane surface. The cleaning function allows the membrane to be recovered and reused, eliminating the need to replace contaminated membranes and enabling continuous operation.
3Quantity of substance
If electrostatic particle attraction is used to concentrate particles, then particle concentration is improved, but energy consumption increases
Solution Approach 1:
The patent uses periodic application of electrical fields rather than continuous operation. Electrical fields are applied only during measurement intervals to concentrate particles, then switched off or reversed during cleaning intervals. This periodic operation achieves necessary particle concentration while significantly reducing average energy consumption compared to continuous field application.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables miniaturization of particle sensors, improves detection accuracy, and extends service life by concentrating particles for precise measurement and reversible cleaning, suitable for applications in tight spaces like automobiles.
Implementation Method 1
A first grating is arranged in the first opening, which is capable by setting it at a first electrical potential of attracting and/or electrically charging particles from the surroundings
Implementation Method 2
The MEMS chip includes a membrane facing toward the first opening, which is capable by setting it at a second electrical potential of attracting particles
Implementation Method 3
the first grating is capable by setting it to a third electrical potential of deflecting particles
Implementation Method 4
a further one of the gratings is capable by setting it to a fourth electrical potential of deflecting particles in the cavity and/or attracting particles from the surroundings
Data Source
AI summary
The application relates to a semiconductor device for particle measurement having a cavity housing and a MEMS chip arranged inside the cavity housing. The housing includes a first opening, via which the cavity is connected to the surroundings and in which a first grating is arranged, which is capable by setting it to a first electrical potential of attracting particles from the surroundings and/or electrically charging them. The MEMS chip includes a membrane facing toward the first opening, which is capable by setting it to a second electrical potential of attracting particles. The application furthermore relates to a method for operating a semiconductor device having a cavity housing and a MEMS chip arranged inside the cavity housing.