Semiconductor Pipe Connect Structure for Tool-Free Fluid Coupling
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Solution Overview
Problem
Traditional fluid connections in semiconductor processing equipment, such as those using flexible metal bands, are time-consuming and inefficient during assembly, disassembly, and reconfiguration, leading to delays in semiconductor fabrication.
Innovation Solution
A connect structure that facilitates the coupling of deformable and non-deformable pipes without tools, utilizing a housing with annular sidewalls and an annular bead made of elastomeric material to securely engage the pipes, allowing for easy rotation and fluid communication.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional flexible metal bands are used for fluid connections, then reliable fluid communication is achieved, but assembly and disassembly become time-consuming
Solution Approach 1:
The connection system is divided into a rigid pipe portion and a flexible pipe portion that can be independently assembled and disassembled. The rigid portion provides stable fluid communication while the flexible portion enables easy connection without tools, resolving the contradiction between reliability and assembly time.
Solution Approach 2:
The flexible pipe portion incorporates dynamic elements that allow for easy expansion and contraction during assembly and disassembly. This dynamic flexibility enables rapid connection while maintaining reliable fluid communication once assembled, addressing both requirements simultaneously.
2Stability of the object's composition
If traditional fluid connections are used, then stable fluid communication is maintained, but reconfiguration efficiency decreases
Solution Approach 1:
By segmenting the connection into rigid and flexible portions, the system maintains stable fluid communication through the rigid portion while allowing rapid reconfiguration through the flexible portion. This segmentation enables frequent reconfiguration without compromising connection stability.
Solution Approach 2:
The flexible pipe portion allows for parameter changes in terms of flexibility and ease of manipulation, enabling rapid reconfiguration. The rigid pipe portion maintains stable fluid communication parameters, thus resolving the contradiction between stability and reconfiguration efficiency.
3Strength
If tool-based assembly methods are used, then secure pipe coupling is achieved, but fabrication delays occur
Solution Approach 1:
The flexible pipe portion is designed to enable self-service assembly without requiring external tools. The inherent flexibility and elasticity of the material allow operators to securely couple pipes through manual manipulation alone, maintaining coupling strength while eliminating tool-related fabrication delays.
Solution Approach 2:
The material parameters of the flexible pipe are optimized to provide sufficient coupling strength through manual assembly alone. The elasticity and flexibility parameters are tuned to allow secure attachment without tools, resolving the contradiction between coupling strength and fabrication efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables rapid and tool-free assembly of pipes, reducing downtime and enhancing the efficiency of semiconductor fabrication processes.
Implementation Method 1
an annular bead to engage an outer sidewall of the deformable pipe and deform an inner sidewall of the deformable pipe toward the non-deformable pipe structure
Data Source
AI summary
A connect structure for semiconductor processing equipment includes a housing configured to mate a deformable pipe with a non-deformable pipe. The housing includes a first annular sidewall to receive the deformable pipe and a second annular sidewall defining a first thread structure. An annular bead is connected to the first annular sidewall to flexibly deform the deformable pipe toward the non-deformable pipe structure when the first thread structure rotatably engages a second thread structure of the non-deformable pipe.