Semiconductor Positioning Stages With Integrated Balance Mass
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Solution Overview
Problem
The increasing acceleration of semiconductor device driver stages in IC manufacturing leads to higher reaction forces on the supporting structure, causing dynamic disturbances and reducing positioning accuracy and stability.
Innovation Solution
A positioning system comprising a long-stroke stage acting as a balance mass between the short-stroke stage and the supporting structure, with the long-stroke stage being linearly movable and the short-stroke stage being rotatable, to absorb and mitigate the high acceleration forces, thereby reducing reaction forces on the supporting structure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If the acceleration of a semiconductor device driver stage is increased to improve positioning speed, then positioning speed is improved, but reaction forces on the supporting structure increase causing dynamic disturbances
Solution Approach 1:
The long-stroke stage functions as a moving balance mass that counteracts the reaction forces generated by the short-stroke stage during acceleration. When the short-stroke stage accelerates the semiconductor device, the long-stroke stage moves in the opposite direction with comparable mass, thereby balancing the reaction forces and minimizing dynamic disturbances to the supporting structure.
Solution Approach 2:
The positioning system is divided into two functional stages: a long-stroke stage for large-range, low-precision positioning that serves as the balance mass, and a short-stroke stage for small-range, high-precision positioning that carries the semiconductor device. This segmentation allows each stage to be optimized for its specific function while the long-stroke stage compensates for the dynamic effects of the short-stroke stage.
2Stability of the object's composition
If a separate moving balance mass is added to counteract reaction forces, then dynamic disturbances are reduced, but device complexity increases
Solution Approach 1:
The balance mass function is merged with the long-stroke stage that is already required for positioning operations. Instead of adding a separate dedicated balance mass component, the long-stroke stage is designed to serve dual purposes: performing its positioning function and simultaneously acting as the counterbalancing mass for the short-stroke stage, thereby reducing overall system complexity.
Solution Approach 2:
The long-stroke stage is designed with multi-functionality, serving both as the positioning mechanism for large-range movement and as the moving balance mass for dynamic stabilization. This universal design eliminates the need for separate components and simplifies the overall system architecture.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for high positioning accuracy and speed while minimizing dynamic disturbances, enabling efficient semiconductor device processing without the need for a separate moving balance mass, and can be implemented with low-performance actuators.
Implementation Method 1
The long-stroke stage acts as a balance mass between the short-stroke stage and the supporting structure
Data Source
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AI summary
A positioning system and method for positioning a semiconductor device are disclosed. In an embodiment, a positioning system for positioning a semiconductor device includes a long-stroke stage configured to be movable with respect to a supporting structure within a plane and a short-stroke stage attached to the long-stroke stage and configured to carry a semiconductor device and to be rotatable within the plane. The long-stroke stage acts as a balance mass between the short-stroke stage and the supporting structure.