Semiconductor Probe Testing via Insulating Liquid Mediator
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Solution Overview
Problem
Conventional methods for evaluating electrical characteristics of semiconductor devices are costly and complex, often leading to partial discharge issues during testing, which complicates the manufacturing process and increases production costs.
Innovation Solution
A method involving the formation of a protection film with openings on a semiconductor substrate, allowing multiple contact probes to connect with a single electrode pad, thereby reducing the risk of partial discharge and simplifying the evaluation process without the need for a complex evaluation apparatus.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a contact probe is used to evaluate electrical characteristics of a power device, then electrical characteristics can be measured, but partial discharge occurs between the contact probe and the subject causing partial breakage
Solution Approach 1:
An insulating liquid is introduced as an intermediary medium between the contact probe and the electrode pad. The contact probe penetrates the insulating liquid to contact the electrode pad, and the insulating liquid fills the gaps and prevents partial discharge occurrence, thereby resolving the contradiction between measurement capability and discharge suppression
Solution Approach 2:
The electrical characteristics evaluation is performed while the contact probe is in a penetrated state through the insulating liquid, changing the environmental parameter from air to insulating liquid medium. This parameter change suppresses partial discharge while maintaining measurement functionality
2Reliability
If a subject is immersed in an insulating liquid for electrical characteristics evaluation, then partial discharge is suppressed, but the evaluation process becomes complicated and time-consuming
Solution Approach 1:
The insulating liquid is segmented into specific regions: a first insulating liquid that surrounds the electrode pad and a second insulating liquid that fills the penetration hole. This segmentation allows the insulating liquid to be precisely positioned only where needed for discharge suppression, rather than completely immersing the subject
Solution Approach 2:
The insulating liquid is applied locally at critical points where partial discharge is most likely to occur (around the electrode pad and in the penetration hole), rather than globally immersing the entire subject. This local application simplifies the evaluation process while maintaining discharge suppression effectiveness
3Reliability
If a subject is arranged in an inert gas atmosphere for electrical measurement, then partial discharge can be suppressed, but the construction of evaluation apparatus becomes complicated and evaluation time increases
Solution Approach 1:
The insulating liquid serves as a localized intermediary medium that eliminates the need for a complex inert gas atmosphere apparatus. The liquid is simply introduced into the evaluation region, providing discharge suppression without requiring complex gas supply systems, pressure control, or atmosphere maintenance equipment
4Productivity
If multiple contact probes are brought into contact with one electrode pad, then electrical characteristics can be evaluated more efficiently, but partial discharge risk increases
Solution Approach 1:
The insulating liquid acts as a mediator that allows multiple contact probes to simultaneously contact the electrode pad without causing partial discharge. The liquid fills the gaps between probes and electrode surfaces, preventing discharge even with multiple contact points, thereby enabling efficient evaluation while suppressing discharge
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables efficient evaluation of electrical characteristics while effectively suppressing partial discharge and reducing production costs by using a simpler evaluation setup.
Implementation Method 1
it has been found that, when a contact probe is brought into contact with an electrode pad of a subject, partial discharge occurs between the contact probe and the electrode pad... by bringing a contact probe in contact with an electrode pad while a tip of the contact probe penetrates an insulating liquid
Data Source
AI summary
A semiconductor wafer is subjected to a protection film formation step process as a process before evaluation of electrical characteristics. In this process, after an insulating film serving as a protection film is formed, a photolithography process and an etching process are performed so as to form a protection film having a plurality of openings exposing an emitter electrode. Then, electrical characteristics are evaluated by bringing a contact probe in contact with the exposed emitter electrode through each opening.