Semiconductor process by-product collecting device
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Solution Overview
Problem
Conventional by-product collecting apparatuses in semiconductor manufacturing have limited capacity, leading to increased operational stoppages, reduced productivity, and higher costs due to frequent cleaning cycles, and are difficult to manufacture with a simple structure that maintains a large collection area.
Innovation Solution
A by-product collecting apparatus with a large volume housing, a heater plate for temperature control, and a lattice-formed by-product collecting tower that efficiently collects and distributes exhaust gases, allowing for extended cleaning cycles and increased capacity with a simplified structure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a conventional trap tube is used to collect by-products, then the structure is simple, but the collection area is very small leading to frequent cleaning cycles
Solution Approach 1:
The trap tube is divided into multiple segments or sections, each capable of collecting by-products independently. This segmentation allows the total collection area to be significantly increased while maintaining the simplicity of individual segment structures, thus resolving the contradiction between structural simplicity and large collection area.
Solution Approach 2:
The trap tube structure transitions from a conventional single-dimension linear design to a multi-dimensional configuration with radial and axial extensions. This dimensional expansion creates additional collection surfaces and volumes, greatly increasing the by-product collection area while preserving the fundamental tubular structure's manufacturing simplicity.
2Quantity of substance
If the trap tube is enlarged to increase collection capacity, then the by-product collection area increases, but the manufacturing difficulty and cost increase
Solution Approach 1:
Instead of manufacturing one large complex trap tube, the system uses multiple smaller modular trap tube segments. Each segment can be manufactured using standard, simple processes, and then assembled to form a large-capacity collection system, avoiding the manufacturing complexity of a single large structure.
Solution Approach 2:
Multiple trap tube segments are nested or arranged concentrically within the housing structure, maximizing the use of available space. This nesting arrangement achieves large collection capacity within a compact footprint while maintaining simple, manufacturable individual components.
3Duration of action of stationary object
If a large-capacity trap is used to collect more by-products, then the cleaning cycle extends, but the device complexity increases
Solution Approach 1:
The trap tube is segmented into multiple independent sections that can be accessed and cleaned separately. This segmentation allows for simplified maintenance procedures where only the necessary segments need to be removed for cleaning, reducing the overall system complexity while enabling extended cleaning cycles through increased capacity.
Solution Approach 2:
The trap tube design incorporates features that facilitate preliminary cleaning preparation, such as removable segments or access ports positioned to enable easy maintenance. This preliminary design consideration allows the large-capacity trap to maintain simple operational procedures and extended cleaning cycles without increasing overall device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively collects a large amount of by-products quickly and efficiently, reducing operational delays and production costs while maintaining a robust and reliable semiconductor manufacturing process.
Implementation Method 1
a heater plate provided on the bottom surface of the upper plate
Data Source
AI summary
Disclosed is an apparatus for collecting a by-product in a semiconductor process, the apparatus including: a housing; a heater plate; a heater power supply unit; first and second upper horizontal brackets collecting a part of a by-product in a powder form; a by-product collecting tower allowing the exhaust gas to pass vertically and collecting a part of the by-product in a powder form; a lower horizontal bracket guiding the exhaust gas toward a window and collecting a part of the by-product in a powder form; the window blocking the powder form by-product from introducing toward a gas collecting and discharging port and guiding the exhaust gas thereto; and the gas collecting and discharging port. Accordingly, the apparatus can increase capacity of collecting by-products with a simple structure, thereby extending a replacement period of the apparatus and collect a large amount of by-products efficiently over a long period of time.