Semiconductor Process Management System for Real-Time Yield Correction

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Solution Overview

Problem

Semiconductor manufacturing processes require high accuracy and efficiency, but existing systems lack effective methods to identify and address process deviations and defects in real-time, leading to reduced yield and reliability.

Innovation Solution

A semiconductor process management system that includes process apparatuses, measuring apparatuses, and a management system with a communicator, determination units, and a recipe generator to establish mutual influence models, detect out-of-spec processes, identify defective apparatuses and factors, and generate new process recipes to improve yield and reliability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If a great number of unit processes are performed through a series of semiconductor manufacturing processes, then the complexity of the manufacturing process increases, but the process yield decreases due to difficulty in identifying and addressing process deviations

Engineering Contradiction:

Improveprocess yieldVSAvoidmanufacturing process complexity

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

The patent implements a feedback mechanism where measured values from measuring apparatus are compared against specification ranges, and when deviations are detected, the system automatically identifies defective apparatus and process factors, then generates corrected process recipes that are fed back to the process apparatuses. This closed-loop feedback system enables real-time process correction without manual intervention, maintaining high yield despite process complexity.

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The process management system acts as an intermediary between multiple process apparatuses and measuring apparatuses. It receives process recipes from process apparatuses, receives measured values from measuring apparatus, determines spec-out conditions, identifies defective apparatus and process factors, and generates corrected process recipes. This intermediary system coordinates the complex interactions among numerous unit processes, making the overall system manageable and controllable.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Manufacturing precision

If multiple process apparatuses perform unit processes according to a planned process sequence, then the manufacturing precision is maintained, but the difficulty of detecting and measuring process deviations increases

Engineering Contradiction:

Improveprocess accuracyVSAvoidprocess deviation detection difficulty

Core Design Contradiction:

Manufacturing precisionVSDifficulty of detecting and measuring

Solution Approach 1:

The patent segments the complex manufacturing process into individual unit processes, each with its own process recipe and measurable parameters. The process management system evaluates each unit process separately by comparing measured values against specification ranges, making it easier to detect deviations in specific processes rather than analyzing the entire manufacturing sequence as a whole.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent replaces manual detection and analysis of process deviations with an automated information processing system. The process management system automatically receives measured values, compares them against specifications, determines spec-out conditions, and identifies defective apparatus using algorithmic analysis rather than mechanical or manual inspection methods.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Reliability

If process deviations are not identified and addressed in real-time, then the ease of operation is maintained, but the reliability of the semiconductor product decreases

Engineering Contradiction:

Improvesemiconductor product reliabilityVSAvoidprocess management complexity

Core Design Contradiction:

ReliabilityVSEase of operation

Solution Approach 1:

The process management system operates autonomously without requiring continuous manual intervention. It automatically receives process recipes, receives measured values from measuring apparatus, determines whether processes are out of specification, identifies defective apparatus and process factors, and generates corrected process recipes that are automatically transmitted to process apparatuses. This self-service capability maintains reliability while minimizing operational complexity.

Inventive Principle:

Principle #25Self-service

Data Source

PatentUS9791855B2Semiconductor process management system, semiconductor manufacturing system including the same, and method of manufacturing semiconductor

Publication Date: 2017.10.17 SAMSUNG ELECTRONICS CO LTD

AI summary

A semiconductor process management system is provided. The semiconductor process management system includes a communicator that receives a process recipe from one or more process apparatuses and receives a measured value for each sampling point from one or more measuring apparatus, and a first determination unit that establishes a mutual influence model between the process recipe and the measured value for each sampling point based on the process recipe and the measured value for each sampling point.