Semiconductor Processing Boat With Pressure Sensor
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Solution Overview
Problem
In semiconductor processing, precise alignment and retention of units during reflow or heat treatment are challenging due to warping or deformation, which can lead to misalignment and defects in the final device.
Innovation Solution
A semiconductor processing boat design featuring embedded magnets as retainers that hold a cover securely over units, using a combination of border and unit retainers to maintain precise alignment and apply sufficient clamping force, while pressure sensors monitor the applied pressure to ensure optimal conditions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If units are held without sufficient clamping force during reflow or heat treatment, then the processing is simpler, but warping or deformation occurs leading to misalignment
Solution Approach 1:
The retention mechanism is segmented into multiple border retainers positioned at different locations around the unit. Each retainer independently contributes to clamping force, allowing the system to achieve precise alignment through distributed retention points rather than a single complex mechanism.
Solution Approach 2:
The patent introduces an intermediary retention mechanism consisting of border retainers that mediate between the cover and the unit. These retainers provide the necessary clamping force to prevent warping during heat treatment, ensuring alignment precision without requiring direct complex coupling between the cover and unit.
2Manufacturing precision
If border retainers are positioned too close to units, then alignment precision improves, but the risk of damage to units increases
Solution Approach 1:
The border retainers are designed with local quality variations in their positioning and structure. They are positioned close enough to provide precise alignment but with specific geometric features that distribute clamping forces safely, preventing damage while maintaining alignment precision.
Solution Approach 2:
The patent optimizes the positional parameters of the border retainers relative to the units. By carefully controlling the distance and angular positioning of retainers, the system achieves the optimal balance between alignment precision and damage prevention through parameter optimization.
3Manufacturing precision
If multiple border retainers are used to improve alignment, then manufacturing precision improves, but device complexity increases
Solution Approach 1:
The border retainers are designed as universal components that serve multiple functions: providing clamping force, defining alignment positions, and protecting unit edges. This multi-functionality reduces the need for additional specialized components, thereby improving alignment precision without proportionally increasing device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design ensures precise alignment and retention of units during processing, preventing warping and deformation, and allows for accurate pressure monitoring to maintain optimal conditions, thereby improving the reliability and precision of semiconductor device assembly.
Implementation Method 1
A semiconductor processing boat design featuring embedded magnets as retainers that hold a cover securely over units
Implementation Method 2
pressure sensors monitor the applied pressure to ensure optimal conditions
Data Source
AI summary
Presented herein is a device processing boat comprising a base and at least one unit retainer disposed in the base. The device further comprises a cover having at least one recess configured to accept and retain at least one unit. The at least one recess is aligned over, and configured to hold the at least one unit over, at least a portion of the at least one unit retainer. The cover is retained to the device processing boat by the at least one unit retainer. At least one pressure sensor having at least one sensel is disposed in the base. The sensel is configured to sense a clamping force applied by the cover to the at least one unit.