Semiconductor processing platform for reduced energy consumption
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Solution Overview
Problem
Existing semiconductor processing tools waste thermal energy without recapturing it, leading to inefficiency and high energy consumption.
Innovation Solution
Integration of heat exchangers and heat pumps in semiconductor processing chambers to recover thermal energy from waste fluids and chemicals, using recirculation loops, thermal storage, and pre-heating tanks to reduce the thermal load on heaters.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If thermal systems are employed to control processing temperature in semiconductor processing chambers, then temperature control is achieved, but thermal energy is exhausted without recapturing it, leading to high energy consumption
Solution Approach 1:
The patent implements a heat recovery system that captures thermal energy from exhaust gases and waste fluids leaving the semiconductor processing chambers. Heat exchangers transfer this waste thermal energy to pre-heat incoming process gases and chemicals, thereby recovering what would otherwise be discarded thermal energy and reducing the load on primary heating systems.
Solution Approach 2:
The system performs preliminary heating of process gases and chemicals using recovered thermal energy before they enter the processing chambers. This pre-heating action reduces the additional energy required by primary heaters to reach the required processing temperatures, thereby reducing overall energy consumption.
2Stability of the object's composition
If multiple heaters are used to maintain temperature in processing chambers and fluid systems, then temperature stability is achieved, but device complexity and cost increase
Solution Approach 1:
The patent combines multiple heating functions into a unified heat recovery and redistribution system. By capturing thermal energy from multiple exhaust streams and consolidating it into a centralized heat exchange network, the system maintains temperature stability across multiple processing zones using fewer independent heaters, thereby reducing system complexity.
3Device complexity
If thermal energy is not recaptured from waste fluids, then system simplicity is maintained, but energy efficiency deteriorates
Solution Approach 1:
The patent introduces heat exchangers as intermediary devices that facilitate thermal energy transfer from waste fluids to incoming process materials. These intermediaries enable energy recovery without fundamentally redesigning the entire processing system, thereby improving energy efficiency while adding minimal complexity through standardized heat exchange components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Improves energy efficiency, reduces the number of heaters needed, lowers overall tool cost, and promotes sustainability by minimizing power consumption and waste heat recovery.
Implementation Method 1
a heat exchanger including a supply-side flow path in fluid communication with the input portion and a heat delivery-side flow path in fluid communication with the waste system, wherein the heat exchanger is configured to transfer thermal energy from the waste system to the input portion to heat the first fluid prior to heating by the heater
Data Source
AI summary
A system includes one or more semiconductor processing chambers, and a processing fluid supply system including an input portion configured to receive a first fluid from a first fluid source, a heater fluidly coupled to the input portion and configured to heat the first fluid, and a heated flow portion fluidly coupled to the heater and configured to deliver a heated processing fluid including the first fluid heated by the heater to the one or more semiconductor processing chambers. A waste system is configured to receive hot waste fluid from the heated flow portion and/or a semiconductor processing chamber. A heat exchanger includes a supply-side flow path in fluid communication with the input portion and a heat delivery-side flow path in fluid communication with the waste system. The heat exchanger is configured to transfer thermal energy from the waste system to the input portion to heat the first fluid.