Semiconductor Protective Layer Anti-Stress Zone Design
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Solution Overview
Problem
Conventional semiconductor structures experience stress concentration at corners due to overlapping protective layers, leading to cracks or separations, which reduces production yield.
Innovation Solution
Incorporating anti-stress zones at the corners of the protective layers, formed by specific geometric arrangements of extension lines and intersection points, to distribute stress evenly and prevent concentration at these areas.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple protective layers are stacked in a layer-by-layer arrangement, then the protection coverage is improved, but stress concentration occurs at the corners leading to cracks or separations
Solution Approach 1:
The patent applies local quality by creating a non-uniform thickness distribution in the protective layers. Specifically, the protective layers are designed with varying thicknesses where certain regions have greater thickness to provide enhanced stress distribution and protection at critical areas, while other regions maintain standard thickness. This localized variation in thickness allows the structure to better handle stress concentrations without compromising overall protection coverage.
Solution Approach 2:
The patent implements curvature by replacing sharp corner geometries with rounded or curved transitions. The protective layers incorporate curved surfaces and rounded corners instead of abrupt angular changes. This curvature design helps to distribute stress more evenly across the corner regions, preventing stress concentration that would otherwise lead to cracks or separations at the corners of the stacked protective layers.
2Manufacturing precision
If protective layers have sharp corner geometries, then the manufacturing precision is improved, but stress concentrates at corners causing cracks or separations
Solution Approach 1:
The patent replaces sharp corner geometries with curved or rounded corner designs in the protective layers. This curvature modification eliminates abrupt angular transitions that cause stress concentration, while still maintaining precise geometric control through manufacturing processes. The curved corners provide smoother stress distribution paths, preventing cracks and separations while preserving manufacturing precision through controlled geometric formation.
Solution Approach 2:
The patent applies local quality by creating specific geometric modifications only at corner regions while maintaining standard precision requirements for other areas. The corner regions feature specialized curved or rounded geometries with controlled radius, while the bulk of the protective layers maintains standard flat geometries. This localized geometric variation addresses stress concentration at corners without compromising overall manufacturing precision.
Data Source
AI summary
A semiconductor structure includes a carrier, a first protective layer, a second protective layer, and a third protective layer. A first surface of the first protective layer comprises a first anti-stress zone. A first extension line from a first bottom edge intersects with a second extension line from a second bottom edge to form a first base point. A first projection line is formed on the first surface, an extension line of the first projection line intersects with the second bottom edge to form a first intersection point, a second projection line is formed on the first surface, and an extension line of the second projection line intersects with the first bottom edge to form a second intersection point. A zone by connecting the first base point, the first intersection point and the second intersection point is the first anti-stress zone.


