Semiconductor Device Protrusion-Recess Guide for Thermal Integration

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Solution Overview

Problem

The integration of power modules and heat sinks in semiconductor devices often results in thermal resistance variations and installation failures due to dimension and positional variations, requiring complex and costly adjustment mechanisms to ensure accurate alignment, which hinders productivity.

Innovation Solution

The use of a semiconductor device design featuring a metal component with recess and protrusion portions of varying heights and inclination angles, where the first protrusion-recess portion serves as a guide to prevent inclination during integration, allowing for stable and accurate positioning without the need for large-scale apparatuses.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If protrusion-recess portions are formed by machining such as forging, die-casting and extrusion, then manufacturing efficiency is improved, but dimension variations and positional variations occur causing inclination during integration

Engineering Contradiction:
Improvemanufacturing efficiencyVSAvoiddimensional accuracy
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The invention changes the geometric parameters of the protrusion-recess portions by providing multiple different shapes with varying heights, widths, and inclination angles. This allows the portions to accommodate dimension variations from machining processes while maintaining proper alignment and preventing inclination during integration, thus resolving the contradiction between manufacturing efficiency and dimensional accuracy.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention employs asymmetric designs where protrusion-recess portions have different shapes, sizes, and inclination angles rather than uniform symmetric forms. This asymmetry enables each portion to be optimally positioned and shaped to compensate for machining variations, ensuring accurate integration without requiring excessive precision in the machining process itself.

Inventive Principle:
Principle #4Asymmetry

2Manufacturing precision

If adjustment processes are performed to eliminate dimension variations and arrange planes in parallel, then installation accuracy is improved, but device complexity and manufacturing cost increase

Engineering Contradiction:
Improveinstallation accuracyVSAvoidprocess complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The invention performs preliminary action by pre-forming protrusion-recess portions with multiple different shapes and inclination angles during the manufacturing process. This preliminary configuration allows the components to self-align during integration without requiring subsequent adjustment processes, thereby achieving high installation accuracy while avoiding the complexity of adjustment mechanisms.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The protrusion-recess portions are designed to automatically self-align and self-position during integration through their varied geometries. The different heights, widths, and inclination angles enable the portions to find their correct positions without external intervention or complex adjustment apparatus, making the system self-correcting and eliminating the need for additional adjustment processes.

Inventive Principle:
Principle #25Self-service

3Measurement precision

If large-scale and high-cost apparatus are used for assembly with adjustment processes, then positioning precision is improved, but productivity decreases

Engineering Contradiction:
Improvepositioning precisionVSAvoidassembly speed
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The invention enables the assembly system to self-position and self-align through the varied geometries of the protrusion-recess portions. Different shapes with multiple inclination angles allow automatic positioning during integration without requiring large-scale positioning apparatus or complex measurement systems, thereby maintaining high positioning precision while enabling fast, simple assembly processes that improve productivity.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enhances productivity by reducing thermal resistance variations and improving the reliability of semiconductor devices through precise positioning and integration, eliminating the need for costly adjustment mechanisms.

Implementation Method 1

a first protrusion-recess portion as a part of the plurality of protrusion-recess portions is greater in height direction dimension than a second protrusion-recess portion other than the first protrusion-recess portion among the plurality of protrusion-recess portions. The first protrusion-recess portion has a wall surface including: a first wall surface portion having a first inclination angle to a height direction; and a second wall surface portion having a second inclination angle different from the first inclination angle.

Methodology Applied
Scientific EffectGeometric constraint: Geometry

Data Source

PatentUS11049787B2Semiconductor device and method of manufacturing the same
Publication Date: 2021.06.29 MITSUBISHI ELECTRIC CORP
  • US11049787B2 patent drawing
  • US11049787B2 patent drawing
  • US11049787B2 patent drawing

AI summary

A metal component and a heat dissipation member are integrated with each other in a plurality of protrusion-recess portions where the plurality of recess portions and the plurality of protrusion portions contact each other. A first protrusion-recess portion as a part of the plurality of protrusion-recess portions is greater in height direction dimension than a second protrusion-recess portion other than the first protrusion-recess portion among the plurality of protrusion-recess portions. A wall surface of the first protrusion-recess portion includes a first wall surface portion having a first inclination angle to a height direction, and a second wall surface portion having a second inclination angle different from the first inclination angle.