Semiconductor Package Radiation Shield Metal Layer

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Solution Overview

Problem

Semiconductor devices face issues with radiation-induced soft errors due to α rays passing through thin silicon substrates, causing malfunctions and data loss in memory controllers, particularly in miniaturized devices where conventional radiation-resistant substrates are expensive and unreliable.

Innovation Solution

Incorporating a metal layer with a shorter α ray range than single-crystal silicon between the semiconductor chip and the substrate, such as copper or nickel, to absorb α rays and prevent them from reaching the circuit, while using a resin substrate with glass fibers for additional radiation discharge.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If a thin silicon substrate is used in miniaturized semiconductor devices, then device size is reduced, but α rays pass through more easily causing radiation-induced soft errors

Engineering Contradiction:
Improvedevice sizeVSAvoidradiation resistance
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

A metal layer is introduced as an intermediary component between the substrate and semiconductor chip. This metal layer specifically blocks α rays while allowing electrical signals to pass through, solving the contradiction by providing radiation protection without interfering with the device's electrical functionality.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent employs a composite structure combining metal material (for radiation blocking) with the semiconductor substrate. This composite approach leverages the unique properties of each material: the metal's ability to block α rays and the semiconductor's electrical conductivity, achieving both radiation resistance and device functionality.

Inventive Principle:
Principle #40Composite materials

2Reliability

If conventional radiation-resistant substrates are used, then reliability against radiation is improved, but cost increases and manufacturing reliability decreases

Engineering Contradiction:
Improveradiation resistanceVSAvoidmanufacturing cost and reliability
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent replaces expensive conventional radiation-resistant substrates with a more economical solution: a standard substrate combined with a thin metal layer. This approach achieves the same radiation protection effect at lower cost and with better manufacturing reliability, treating the metal layer as a cost-effective protective component.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Solution Approach 2:

The invention changes the approach to radiation protection by modifying the structural parameters of the device - adding a metal layer with specific thickness and material properties - rather than changing the entire substrate material. This parameter-based solution maintains manufacturing simplicity while achieving radiation resistance.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If a metal layer is added to block α rays, then radiation protection is improved, but device structure becomes more complex

Engineering Contradiction:
Improveradiation protectionVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The metal layer serves multiple functions simultaneously: it blocks α rays for radiation protection, maintains electrical signal transmission, and can serve as part of the device's electrical interconnection structure. This multi-functionality reduces the need for additional separate components, thereby limiting the increase in structural complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Effectively prevents α ray-induced malfunctions and data loss in semiconductor memory devices by reducing the α ray range, allowing for thinner substrates and cost-effective, reliable radiation protection.

Implementation Method 1

A metal layer is provided between the second surface of the semiconductor chip and the upper surface of the substrate. A metal material, for which the range of α rays is shorter than for single-crystal silicon, is used in the metal layer.

Methodology Applied
Scientific Effectα ray absorption: Absorption (EM radiation)

Implementation Method 2

A glass material contained in the substrate or the adhesive layer may emit radiation such as α rays in some cases.

Methodology Applied
Scientific EffectRadiation emission: Radioactive Decay

Data Source

PatentUS10916508B2Semiconductor device package with radiation shield
Publication Date: 2021.02.09 KIOXIA CORP
  • US10916508B2 patent drawing
  • US10916508B2 patent drawing
  • US10916508B2 patent drawing

AI summary

A semiconductor device includes a substrate and a semiconductor chip. The semiconductor chip includes a semiconductor element on a first surface thereof. The semiconductor chip is provided on the substrate such that a second surface thereof, which is opposite to the first surface, faces an upper surface of the substrate. A metal layer is provided between the second surface of the semiconductor chip and the upper surface of the substrate. A metal material, in which the range of α rays is shorter than for single-crystal silicon, is used in the metal layer.