Semiconductor Device Temperature-Stabilizing Resistance Area

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Solution Overview

Problem

Semiconductor devices face durability and life-cycle issues due to voltage and current peaks during switch-off, particularly in power semiconductors, which can lead to destruction and reduced lifespan.

Innovation Solution

A semiconductor device design incorporating a first conductivity type area separated by a second conductivity type region, with a temperature-stabilizing resistance area within the second doping region, providing a lower resistance variation over operating temperatures, and featuring deep energy states or increased defect density to stabilize resistance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conventional semiconductor device structure is used, then the device can operate, but it experiences high current peaks during switch-off leading to reduced durability and life cycle

Engineering Contradiction:
ImprovedurabilityVSAvoidcurrent peaks
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The semiconductor substrate is divided into multiple doped regions with different conductivity types (first doping region, second doping region, first conductivity type area) to segment the current flow path. This segmentation prevents concentrated current peaks by distributing the current through multiple zones with different electrical properties, thereby reducing stress on any single region and improving overall device durability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the semiconductor substrate are assigned different doping characteristics (conductivity types, defect densities, energy states) to create local quality variations. The temperature-stabilizing resistance area with deep energy states and high defect density provides localized resistance to current flow, while the first conductivity type area provides low resistance paths. This local quality differentiation enables controlled current distribution that suppresses harmful current peaks while maintaining operational reliability.

Inventive Principle:
Principle #3Local quality

2Ease of operation

If the resistance varies significantly with temperature, then the device responds to temperature changes, but the switch-off process becomes less soft and current peaks increase

Engineering Contradiction:
Improveswitch-off softnessVSAvoidcurrent stability
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The patent introduces a temperature-stabilizing resistance area with deep energy states (more than 150 meV from conduction and valence bands) and high defect density, which fundamentally changes the resistance-temperature relationship. This parameter change creates a region whose resistance remains relatively stable across temperature variations, providing a buffering effect during switch-off that softens the transition and prevents sharp current peaks, thereby improving both ease of operation and current stability.

Inventive Principle:
Principle #35Parameter changes

3Stability of the object's composition

If deep energy states and high defect density are introduced, then resistance stability over temperature improves, but the manufacturing complexity increases

Engineering Contradiction:
Improveresistance stabilityVSAvoiddoping structure
Core Design Contradiction:
Stability of the object's compositionVSDevice complexity

Solution Approach 1:

The temperature-stabilizing resistance area is formed during the manufacturing process by introducing dopants with deep energy states and creating high defect density regions in advance. This preliminary action embeds the resistance-stabilizing properties directly into the semiconductor substrate structure during fabrication, rather than requiring post-manufacturing adjustments. The deep energy states (more than 150 meV from bands) and high defect density are established through controlled doping and processing steps, providing inherent resistance stability across temperature ranges without adding operational complexity.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enhances the softness of the switch-off process, reducing current changes and improving durability and life-cycle by maintaining stable resistance across a wide temperature range, thereby increasing the semiconductor device's lifespan.

Implementation Method 1

The at least one temperature-stabilizing resistance area comprises a doping causing energy states with a distance to the conduction band and to the valence band of the semiconductor material of the semiconductor substrate of more than 150 meV

Methodology Applied
Scientific EffectDeep energy states:

Implementation Method 2

an average defect density within the at least one temperature-stabilizing resistance area is more than twice an average defect density within at least a part of the second doping region located adjacent to the at least one temperature-stabilizing resistance area

Methodology Applied
Scientific EffectDefect density:

Data Source

PatentUS9252292B2Semiconductor device and a method for forming a semiconductor device
Publication Date: 2016.02.02 INFINEON TECHNOLOGIES AG

AI summary

A semiconductor device includes a semiconductor substrate. The semiconductor substrate includes a first doping region arranged at a main surface of the semiconductor substrate, an emitter layer arranged at a back side surface of the semiconductor substrate, at least one first conductivity type area separated from the first doping region by a second doping region of the semiconductor substrate and at least one temperature-stabilizing resistance area. The first doping region has a first conductivity type and the emitter layer has at least mainly a second conductivity type. The second doping region has the second conductivity type and the at least one first conductivity type area has the first conductivity type. The at least one temperature-stabilizing resistance area is located within the second doping region and adjacent to the at least one first conductivity type area. Further, the at least one temperature-stabilizing resistance area has a lower variation of a resistance over a range of an operating temperature of the semiconductor device than at least a part of the second doping region located adjacent to the at least one temperature-stabilizing resistance area.