Semiconductor Scheduler Search Tree Optimization
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Solution Overview
Problem
Current semiconductor processing systems face challenges in maintaining high throughput and efficiency due to inflexible scheduling methods that fail to adapt to changing processing circumstances, leading to bottlenecks and inefficiencies.
Innovation Solution
A controller-based system that generates a search tree of potential actions to optimize substrate processing by determining the current state of the system, scoring branch pathways for improved throughput, and selecting the most efficient sequence of actions in real-time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If traditional scheduling methods are used, then system operation is simple, but system throughput is reduced due to bottlenecks and inability to adapt to changing circumstances
Solution Approach 1:
The scheduling system dynamically generates search trees based on current system state, allowing the scheduling approach to adapt and change as conditions evolve during substrate processing, rather than following fixed predetermined schedules
Solution Approach 2:
The system continuously monitors current state (substrate locations, processing status) and uses this feedback to generate appropriate search trees and select optimal branch pathways, creating a closed-loop control system that responds to actual system conditions
2Adaptability or versatility
If dynamic search tree generation is implemented, then adaptability to changing circumstances is improved, but computational complexity increases
Solution Approach 1:
The search tree is built incrementally by segmenting the problem into individual actions and branch pathways, allowing the system to process complex scheduling decisions through manageable sequential steps rather than evaluating all possibilities simultaneously
Solution Approach 2:
The system performs preliminary scoring of branch pathways during search tree generation, preparing evaluation metrics in advance to facilitate faster selection of optimal paths when decisions are needed
Data Source
AI summary
A semiconductor processing system that includes a controller is disclosed. The controller may be configured to schedule the operation of the system. The controller may be programmed to determine a current state of the system. The current state may be defined at least by a location of one or more substrates and a processing status of the one or more substrates. The controller may be further programmed to generate a search tree having one or more branches. Each branch may identify one or more subsequent actions or branch pathways capable of being performed by the system in the current state. Further, the controller may be programmed to score each branch pathway of the generated search tree. The controller may be programmed to select a branch pathway and provide instructions to perform the actions in that branch pathway based at least in part on the score of the branch pathway.