Semiconductor Device Schottky Zener Junction Trade-off

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Solution Overview

Problem

General Zener diodes have a long reverse recovery time, leading to delays in signal processing, especially at increased signal speeds, and using Schottky barrier diodes can reduce ESD tolerance.

Innovation Solution

A semiconductor device with a Schottky junction portion and a pn junction portion, where the pn junction portion has a higher withstand voltage than the Zener voltage, allowing for a shorter reverse recovery time and maintaining a high ESD tolerance by utilizing two independent regions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a general Zener structure (pn junction portion) is used, then Zener characteristics are achieved, but reverse recovery time becomes long

Engineering Contradiction:
ImproveZener characteristicsVSAvoidreverse recovery time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The invention divides the semiconductor device into two distinct functional regions: a first conductivity type region (n-type) that forms a Schottky junction with the electrode for fast reverse recovery, and a second conductivity type region (p-type) that forms a pn junction for Zener breakdown characteristics. This segmentation allows each region to independently perform its specialized function without interfering with the other.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention merges a Schottky barrier diode structure and a Zener diode structure into a single integrated device. The Schottky junction portion handles the reverse recovery time requirement while the pn junction portion handles the Zener voltage clamping, combining the advantages of both diode types into one device that satisfies multiple performance requirements simultaneously.

Inventive Principle:
Principle #5Merging (Combining)

2Loss of time

If a Schottky barrier diode is used to shorten reverse recovery time, then reverse recovery time is reduced, but ESD permissible amount is lowered

Engineering Contradiction:
Improvereverse recovery timeVSAvoidESD permissible amount
Core Design Contradiction:
Loss of timeVSReliability

Solution Approach 1:

The device segments the current handling functions between two regions: the n-type first conductivity type region handles high-speed switching with the Schottky junction, while the p-type second conductivity type region provides enhanced ESD tolerance through the pn junction structure. This segmentation allows the ESD permissible amount to be maintained or improved while achieving fast reverse recovery.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention creates a composite semiconductor structure combining n-type and p-type regions with different properties. The n-type region optimized for Schottky junction performance provides fast reverse recovery, while the p-type region optimized for pn junction characteristics provides high ESD tolerance, creating a composite device that exhibits both properties simultaneously.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The device achieves a balance between shortening reverse recovery time, maintaining Zener characteristics, and ensuring a high ESD tolerance, effectively addressing the limitations of both Schottky and Zener diodes.

Implementation Method 1

a Schottky electrode that is formed on the semiconductor layer and that forms a Schottky junction portion between a first conductivity type part of the semiconductor layer and the Schottky electrode

Methodology Applied
Scientific EffectSchottky junction:

Implementation Method 2

a pn junction portion between the peripheral impurity region and the first conductivity type part of the semiconductor layer has a higher withstand voltage than a Zener voltage Vz of a Zener diode made of a pn junction portion between the second conductivity type region and the first conductivity type part of the semiconductor layer

Methodology Applied
Scientific Effectpn junction breakdown:

Data Source

PatentUS11031386B2Semiconductor device
Publication Date: 2021.06.08 ROHM CO LTD
  • US11031386B2 patent drawing
  • US11031386B2 patent drawing
  • US11031386B2 patent drawing

AI summary

A semiconductor device includes a first conductivity type semiconductor layer, a second conductivity type region selectively formed in the semiconductor layer, a second conductivity type peripheral impurity region formed around the second conductivity type region in the semiconductor layer, and a Schottky electrode that is formed on the semiconductor layer and that forms a Schottky junction portion between a first conductivity type part of the semiconductor layer and the Schottky electrode, and, in the semiconductor device, a pn junction portion between the peripheral impurity region and the first conductivity type part of the semiconductor layer has a higher withstand voltage than a Zener voltage VZ of a Zener diode made of a pn junction portion between the second conductivity type region and the first conductivity type part of the semiconductor layer.