Semiconductor Tool Screen Control for Local and Remote Operation
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Solution Overview
Problem
Existing semiconductor manufacturing systems face challenges in efficiently managing simultaneous remote and local operations within clean room environments, where maintaining a constant environment requires minimizing human entry and exit, and existing remote control systems are limited in their ability to handle multiple users and exclusive control scenarios.
Innovation Solution
A semiconductor manufacturing system that includes a local operation terminal, remote operation terminals connected via a network, and a controller managing simultaneous login states and screen data creation for independent apparatus screens displayed on both terminals, allowing for exclusive control and operation from different user interfaces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If a remote control system is implemented to minimize human entry and exit in clean room environments, then the clean room environment stability is improved, but the ability to handle multiple users and exclusive control scenarios deteriorates
Solution Approach 1:
The system segments the control interface by providing separate local and remote operation terminals, each capable of independent login and operation. The controller manages multiple login states simultaneously, allowing different users to access the apparatus through different terminals without interfering with each other, thus maintaining clean room stability while enabling multi-user control
Solution Approach 2:
The controller is designed with universal functionality to handle both local and remote operations through a unified login state management mechanism. It can manage multiple simultaneous logins from different terminals, switch between exclusive and shared control modes, and provide consistent interface functionality across all access points, thereby achieving both environment stability and multi-user adaptability
2Reliability
If exclusive control is implemented for local operation terminals in clean room environments, then operational security is improved, but remote operation capability deteriorates
Solution Approach 1:
The control system implements dynamic login state management where the controller can switch between exclusive local control mode and shared remote control mode based on real-time operational needs. When local operation is detected, remote terminals are automatically logged out for exclusive control; when remote operation is needed, the system transitions to allow remote access, thus maintaining security while enabling remote capability
3Productivity
If multiple terminals are allowed to access the apparatus simultaneously, then working efficiency is improved, but control complexity deteriorates
Solution Approach 1:
The controller implements feedback mechanisms through login state management that automatically monitors and tracks which terminals are logged in and their operational status. This feedback system enables the controller to manage multiple simultaneous logins efficiently, coordinate operations between terminals, and maintain system state consistency, thus supporting high productivity while managing control complexity through automated state tracking
Data Source
AI summary
A semiconductor manufacturing system includes: a local operation terminal that displays an apparatus screen of a semiconductor manufacturing apparatus; at least one remote operation terminals that are connected to the semiconductor manufacturing apparatus via a network, and display the apparatus screen; and a controller that controls the semiconductor manufacturing apparatus based on an operation received from a user by the local operation terminal and the remote operation terminal that display the apparatus screen. The control device includes: a login state managing unit; an apparatus screen display state managing unit; and a screen data creating unit that creates screen data of the apparatus screen based on the simultaneous login state and the apparatus screen display state.