Semiconductor Sheet Layout for Low-Contamination Biosensor Electrodes
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Solution Overview
Problem
Existing methods for manufacturing semiconductor devices, such as field effect transistors, face challenges in improving device performance due to contamination from insulators and resist residues on the semiconductor sheet, which affect electrical characteristics and hinder accurate detection of target molecules like viruses.
Innovation Solution
A semiconductor device configuration involving a substrate with electrodes covered by an insulator featuring openings, allowing a semiconductor sheet to be transferred onto exposed portions, reducing contamination and enabling better electrical connections and receptor placement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the insulator is formed to cover electrodes and the semiconductor sheet is formed thereon, then device performance is improved, but contamination from insulator and resist materials affects electrical characteristics and receptor placement
Solution Approach 1:
The semiconductor sheet is divided into a first semiconductor sheet formed on the insulator and a second semiconductor sheet formed on the exposed electrode portion, with these sheets being electrically connected. This segmentation allows the first sheet to be isolated from contamination by the insulator and resist materials, while the second sheet maintains electrical connection to the electrode, thus resolving the contradiction between device performance improvement and contamination avoidance.
Solution Approach 2:
The first semiconductor sheet acts as an intermediary between the insulator-covered electrode and the second semiconductor sheet. It provides a clean interface that transfers electrical signals without direct contact between the contaminated insulator surface and the active semiconductor region, thereby maintaining electrical characteristics while preventing contamination transfer.
2Reliability
If the insulator covers at least a portion of the electrodes, then electrical isolation is improved, but receptor placement accuracy on semiconductor sheet is reduced due to contamination
Solution Approach 1:
The semiconductor structure is segmented into multiple sheets where the first semiconductor sheet on the insulator provides electrical isolation, while the second semiconductor sheet on the exposed electrode provides a clean surface for precise receptor placement. This segmentation allows both electrical isolation and manufacturing precision to be achieved simultaneously.
Solution Approach 2:
Different regions of the semiconductor structure have different qualities: the first semiconductor sheet region provides electrical isolation properties when in contact with the insulator, while the second semiconductor sheet region provides a clean, contamination-free surface for receptor placement. This local differentiation of quality resolves the contradiction between electrical isolation and manufacturing precision.
3Device complexity
If a single semiconductor sheet is used on the substrate, then device structure is simple, but electrical characteristics and detection accuracy are reduced due to surface contamination
Solution Approach 1:
The semiconductor system is segmented into multiple sheets with distinct functions: the first sheet handles electrical connection through the insulator, while the second sheet provides a clean detection surface. This segmentation improves measurement precision without significantly increasing overall device complexity, as the sheets work together as an integrated system.
Solution Approach 2:
The first semiconductor sheet serves as an intermediary that handles the contaminated interface with the insulator, while protecting the second semiconductor sheet that performs the actual detection function. This intermediary structure allows the detection surface to remain clean and accurate while maintaining electrical connectivity.
Data Source
AI summary
A semiconductor device according to the present invention includes a substrate, a plurality of electrodes on the substrate, an insulator provided with one or a plurality of openings exposing at least one electrode among the plurality of electrodes on the substrate, the insulator covering at least a portion of the plurality of electrodes, and a semiconductor sheet on the insulator and one or a plurality of exposed portions exposed from the one or the plurality of openings on the substrate.