Semiconductor Device Side Surface Electrode Visual Inspection

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Solution Overview

Problem

Conventional semiconductor devices require X-ray inspection to confirm solder bonding state due to the absence of wiring layers on side surfaces after dicing, making visual confirmation difficult.

Innovation Solution

A semiconductor device design with a substrate, wiring layer, semiconductor element, and sealing resin, where the side surface electrode is exposed and flush with the resin side surface, allowing for visual confirmation of solder bonding, and a manufacturing method involving groove formation, wiring layer deposition, semiconductor mounting, and resin cutting to create exposed electrodes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If dicing is performed after forming the wiring layer on the Si wafer, then the semiconductor elements are divided into individual pieces, but the wiring layer is not formed on the side surface of the Si substrate, making visual confirmation of solder bonding difficult

Engineering Contradiction:
Improvewiring layer formationVSAvoidsolder bonding inspection
Core Design Contradiction:
Manufacturing precisionVSDifficulty of detecting and measuring

Solution Approach 1:

The wiring layer is formed on the Si wafer before dicing, ensuring that the wiring structure is established in advance. This preliminary formation allows the wiring layer to extend onto the side surfaces after dicing, enabling visual inspection of solder bonding without requiring additional post-dicing processing steps.

Inventive Principle:
Principle #10Preliminary action

2Ease of manufacture

If the wiring layer is formed only on the top surface of the Si substrate, then the manufacturing process is simple, but the solder bonding state cannot be visually confirmed

Engineering Contradiction:
Improvewiring layer fabricationVSAvoidbonding inspection
Core Design Contradiction:
Ease of manufactureVSEase of operation

Solution Approach 1:

The wiring layer is extended from the top surface onto the side surfaces of the Si substrate. This dimensional extension allows the wiring layer to serve dual purposes: maintaining simple top-surface formation processes while simultaneously enabling visual inspection of solder bonding from the side, thus resolving the contradiction between manufacturing simplicity and inspection ease.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Reliability

If the side surface electrode is not exposed from the sealing resin, then the sealing is complete and protected, but the solder bonding state remains invisible

Engineering Contradiction:
Improvesealing protectionVSAvoidbonding state detection
Core Design Contradiction:
ReliabilityVSDifficulty of detecting and measuring

Solution Approach 1:

The side surface electrode is selectively exposed from the sealing resin at specific locations while maintaining sealing protection in other areas. This local exposure allows visual confirmation of solder bonding at the electrode interface without compromising the overall sealing protection of the semiconductor element, resolving the contradiction between sealing reliability and bonding detectability.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables easy and visual confirmation of solder bonding during mounting on a circuit board, enhances solder bonding strength with external plating, and prevents chipping during silicon substrate processing.

Implementation Method 1

a wiring layer (20) formed on the Si substrate (10)

Methodology Applied
Scientific EffectDeposition: Deposition (physical)

Implementation Method 2

when the semiconductor device is mounted on a circuit board of an electronic device or the like using solder

Methodology Applied
Scientific EffectSoldering: Soldering

Data Source

PatentUS10930615B2Semiconductor device and method of manufacturing semiconductor device
Publication Date: 2021.02.23 ROHM CO LTD
  • US10930615B2 patent drawing
  • US10930615B2 patent drawing
  • US10930615B2 patent drawing

AI summary

Semiconductor device includes: substrate having substrate main surface and substrate rear surface facing opposite sides to each other in first direction, and substrate side surface facing in second direction orthogonal to the first direction; wiring layer having main surface electrode covering a portion of the substrate main surface, and side surface electrode connected to the main surface electrode and covering a portion of the substrate side surface; semiconductor element electrically connected to the main surface electrode and mounted on the substrate to face the substrate main surface; and sealing resin having resin side surface facing in the same direction as the substrate side surface, and covering the semiconductor element and the main surface electrode, wherein the side surface electrode has side exposed surface exposed from the sealing resin and facing in the same direction as the substrate side surface, the side exposed surface being flush with the resin side surface.