Semiconductor SPR Sensor Layout Using a Surface-Emitting Laser
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Solution Overview
Problem
Existing surface plasmon resonance sensors using light-emitting diodes suffer from reduced measurement accuracy due to non-polarized light emission, and existing miniaturization techniques limit the size reduction of such devices.
Innovation Solution
A measurement device utilizing a surface emitting laser as a light source integrated with a semiconductor substrate, incorporating an inclined mirror structure and a photodiode array, which allows for precise surface plasmon resonance measurement and miniaturization through semiconductor processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If separate light sources and light-transmitting media are used in surface plasmon resonance sensor apparatuses, then device functionality is maintained, but measurement accuracy deteriorates and device miniaturization is hindered
Solution Approach 1:
The patent combines the light source and light-transmitting medium into a single integrated semiconductor substrate structure. The light-emitting element is formed directly on the semiconductor substrate, eliminating the need for separate components and their associated alignment mechanisms, thereby improving measurement accuracy while simplifying device structure.
Solution Approach 2:
The semiconductor substrate serves multiple functions simultaneously: it acts as the light-transmitting medium, provides structural support, and hosts the light-emitting element. This multi-functionality reduces the number of separate components needed, contributing to both measurement accuracy improvement and device miniaturization.
2Volume of moving object
If separate light sources and light-transmitting media are used, then component functionality is preserved, but device size increases and compactness is reduced
Solution Approach 1:
By integrating the light source and light-transmitting medium into one semiconductor substrate, the overall device volume is significantly reduced. The patent achieves compact dimensions suitable for portable and wearable applications while maintaining all necessary functional components within the unified structure.
Solution Approach 2:
The light-emitting element is nested within or directly formed on the semiconductor substrate, with the substrate itself serving as the light-transmitting medium. This nested arrangement maximizes space utilization and minimizes device footprint.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device achieves higher measurement accuracy and reduced size by using a surface emitting laser for polarized light excitation and integrating components through semiconductor processes, enabling sensitive and compact surface plasmon resonance sensing.
Implementation Method 1
a light-emitting element that is disposed on the semiconductor substrate and that emits light into the semiconductor substrate
Implementation Method 2
a measurement portion on which the light that has passed through the semiconductor substrate is incident as incident light and that reflects at least a part of the incident light as reflected light
Implementation Method 3
a light-receiving element that receives the reflected light that has passed through the semiconductor substrate
Data Source
AI summary
A measurement device includes a semiconductor substrate, a light-emitting element that emits light into the semiconductor substrate, a measurement portion on which the light that has passed through the semiconductor substrate is incident as incident light and that reflects at least a part of the incident light as reflected light, and a light-receiving element that receives the reflected light that has passed through the semiconductor substrate.