Semiconductor State Value Correction for Unified Monitoring
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Solution Overview
Problem
Conventional information processing systems face difficulties in accurately monitoring and comparing state values from semiconductor manufacturing apparatuses due to differences in set values, measurement units, and units of measurement, leading to complex operations and inefficiencies in analyzing treatment results.
Innovation Solution
An information processing apparatus that receives set and state values, calculates correction amounts using a correction function to align state values across different set values, allowing for accurate superimposition and comparison, and converts state values into ratios for unified analysis, enabling efficient monitoring and multivariate analysis regardless of measurement units.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If state values from semiconductor manufacturing apparatuses with different set values are monitored and compared directly, then monitoring can be performed, but the values cannot be accurately compared due to differences in set values and measurement units, requiring complex operations and multiple control charts
Solution Approach 1:
The patent transforms state values by applying correction amounts derived from correction functions that account for differences in set values and measurement units. This parameter transformation allows state values from different manufacturing conditions to be compared on a unified scale, resolving the contradiction between accurate comparison and operational complexity
Solution Approach 2:
The patent introduces correction functions and correction amounts as intermediary elements between raw state values and comparable normalized values. These intermediaries bridge the gap between different measurement systems and set values, enabling accurate comparison without requiring complex manual operations
2Reliability
If multiple control charts are used to manage state values from different set values, then each set value can be monitored separately, but operations become complicated and threshold values must be set separately for each chart, consuming time and effort
Solution Approach 1:
The patent creates a universal monitoring framework where a single control chart can display state values from multiple different set values after correction. The correction functions serve as multi-functional tools that normalize various measurement systems, eliminating the need for separate charts and threshold settings for each set value
Solution Approach 2:
The patent merges multiple separate control charts into a single unified control chart by correcting and normalizing state values from different set values. This consolidation combines the monitoring function for all set values into one system, reducing operational complexity and threshold setting time
3Ease of operation
If state values with different measurement units are displayed in a superimposed manner, then visualization can be achieved, but accurate comparison is difficult because units and scales differ
Solution Approach 1:
The patent applies parameter transformation by converting state values with different measurement units into a common normalized scale using correction functions. This changes the parameters of the displayed values while preserving their relative relationships, enabling both easy visualization and accurate comparison
Data Source
AI summary
A information processing apparatus 100 for processing an acquired value, which is a value acquired in regard to a state during a treatment, performed by a semiconductor manufacturing apparatus 200 for performing a treatment on a treatment target containing a semiconductor according to a set value, which is a value for setting a condition of a treatment, includes: a set value receiving portion 101 for receiving the set value; a state value receiving portion 102 for receiving the acquired value; a correction amount calculating portion 103 for calculating a correction amount of the acquired value, using a correction function indicating a relationship between the set value and the acquired value; a correcting portion 104 for correcting the acquired value received by the state value receiving portion 102, using the correction amount calculated by the correction amount calculating portion 103; and an output portion 105 for outputting a result of correction performed by the correcting portion 104.