Semiconductor Characteristic Estimation via Step List Comparison

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

The manufacturing process of semiconductor elements involves numerous steps, making it difficult to verify step dependency and compare the characteristic values of newly prototyped elements with previously prototyped ones, requiring significant effort and expertise.

Innovation Solution

A semiconductor element characteristic value estimation system that includes an input portion, database, and processing portion for comparing step lists and characteristic values, using algorithms like diff for step comparison, t-tests for two characteristic values, and regression analysis to estimate characteristic values from similar step lists.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional manual methods are used to compare manufacturing steps and characteristic values, then expertise and knowledge are required for accurate analysis, but enormous effort and time are required

Engineering Contradiction:

Improveaccuracy of characteristic value comparisonVSAvoidtime required for comparison

Core Design Contradiction:

Measurement precisionVSLoss of time

Solution Approach 1:

The patent creates a database that stores manufacturing step lists and characteristic values from previously prototyped semiconductor elements. This database serves as a reference copy that can be automatically compared with new prototyping data, eliminating the need for manual expertise while maintaining accurate comparison capabilities.

Inventive Principle:

Principle #26Copying

Solution Approach 2:

The patent replaces manual expert analysis with an automated information processing system that uses databases and algorithms to compare manufacturing steps and characteristic values. This substitution of mechanical human effort with automated computational methods reduces both time and expertise requirements.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Loss of information

If detailed manual verification of step dependency is performed, then accurate understanding of manufacturing process influence is achieved, but enormous effort is required

Engineering Contradiction:

Improvecompleteness of step dependency verificationVSAvoideffort required for verification

Core Design Contradiction:

Loss of informationVSEase of manufacture

Solution Approach 1:

The system stores complete manufacturing step lists in a database as reference copies. These stored step lists can be automatically retrieved and compared with new prototyping data, enabling comprehensive step dependency verification without manual effort.

Inventive Principle:

Principle #26Copying

Solution Approach 2:

The database system automatically performs the verification of step dependency by comparing manufacturing steps and characteristic values without requiring human intervention. The system serves itself by autonomously analyzing the relationship between manufacturing steps and device characteristics.

Inventive Principle:

Principle #25Self-service

3Reliability

If extensive prototyping is conducted to compare characteristic values, then reliable comparison data is obtained, but development time and costs increase

Engineering Contradiction:

Improvereliability of characteristic value comparisonVSAvoiddevelopment speed

Core Design Contradiction:

ReliabilityVSProductivity

Solution Approach 1:

The patent uses a database that stores characteristic values from previous prototyping as reference data. This allows new prototyping efforts to be minimized by comparing against stored reference data, thereby maintaining reliability while reducing development time and costs.

Inventive Principle:

Principle #26Copying

Solution Approach 2:

The system performs preliminary data collection and storage of manufacturing steps and characteristic values in a database before new prototyping begins. This preliminary preparation enables faster and more reliable comparisons during subsequent development cycles.

Inventive Principle:

Principle #10Preliminary action

Data Source

PatentUS20220285231A1Semiconductor element characteristic value estimation method and semiconductor element characteristic value estimation system

Publication Date: 2022.09.08 SEMICON ENERGY LAB CO LTD

AI summary

A semiconductor element characteristic value estimation system is provided. The semiconductor element characteristic value estimation system includes an input portion, a database, and a processing portion. A first step list, a second step list, and a characteristic value of a semiconductor element are input to the input portion. The database has a function of storing a group of step lists and a group of characteristic values of semiconductor elements. The processing portion has a function of performing comparison between two step lists selected from the first step list and the group of step lists; a function of performing a test using two or more characteristic values of semiconductor elements selected from the characteristic value of the semiconductor element and the group of characteristic values of the semiconductor elements; a function of performing regression analysis of parameters for a step and two or more characteristic values of semiconductor elements selected from the characteristic value of the semiconductor element and the group of characteristic values of the semiconductor elements; and a function of estimating a characteristic value of a semiconductor element from the second step list.