Semiconductor Stocker Shelving and Forking for High-Density Storage
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Solution Overview
Problem
Current storage systems for semiconductor workpieces and tools in manufacturing facilities face inefficiencies in space utilization and tracking, as well as challenges in maintaining environmental quality, leading to potential damage and reduced productivity.
Innovation Solution
The implementation of a stocker system with optimized storage carrier and shelf configurations, including RFID tracking, and an air flow circulation system to control humidity and contaminants, along with a forking robot mechanism for efficient storage and retrieval of storage carriers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If traditional storage systems are used for semiconductor workpieces, then workpieces can be stored in an enclosed environment, but space utilization is inefficient and tracking is challenging
Solution Approach 1:
The patent implements a nested storage configuration where storage carriers are placed on shelves within the stocker, and RFID tags are embedded within the storage carriers. This nested arrangement maximizes space utilization while integrating tracking functionality into the existing storage structure, avoiding additional external tracking infrastructure.
Solution Approach 2:
The patent replaces manual tracking methods with RFID (radio frequency identification) technology. RFID tags attached to storage carriers enable automated, contactless tracking of workpieces throughout the storage and manufacturing process, eliminating the need for complex manual tracking systems and reducing operational complexity.
2Quantity of substance
If storage systems are expanded to increase capacity, then more workpieces can be stored, but the system size increases and space utilization decreases
Solution Approach 1:
The patent transitions from horizontal expansion to vertical utilization by implementing multi-level shelving within the stocker. Storage carriers are arranged on multiple shelves stacked vertically, allowing the system to accommodate more workpieces without increasing the horizontal footprint, thus improving space utilization efficiency.
Solution Approach 2:
The patent employs nested storage carriers that can be stacked and stored within the compact stocker structure. The storage carriers are designed to nest efficiently on shelves, maximizing the use of vertical space and internal volume without requiring system expansion.
3Reliability
If environmental control is implemented to maintain workpiece quality, then workpieces are protected from deterioration, but energy consumption increases
Solution Approach 1:
The patent creates a controlled enclosed environment within the stocker that maintains stable temperature and humidity conditions, effectively creating an inert atmosphere protective of semiconductor workpieces. This controlled environment prevents deterioration from environmental fluctuations without requiring excessive energy input by maintaining moderate, stable conditions rather than extreme controlled states.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances space utilization, improves tracking efficiency, and maintains environmental quality, thereby increasing the storage capacity and productivity in semiconductor manufacturing facilities without expanding the storage system's size.
Implementation Method 1
an air flow circulation system to control humidity and contaminants
Implementation Method 2
RFID tracking
Data Source
AI summary
The present disclosure is directed to a stocker utilizing one or more storage carriers to optimize the utilization of a storage compartment within the stocker. The stocker includes one or more storage towers each including one or more shelves that may be moved from a closed position to an opened position by being pulled outward by a hook of a forking structure. This forking structure is configured to lift up a corresponding storage carrier off the shelf to be transported to a storage carrier load port to position one or more workpieces or toolpieces within the storage carrier, which is then transported back to the corresponding shelf for storage. The utilization of the forking structure along with the pull out shelves allows for a large number of storage carriers to be stored within the storage compartment of the stocker.