Semiconductor Container Storage Airflow Control via Drawing-In Device
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Solution Overview
Problem
Existing storage facilities for semiconductor containers face challenges in reducing air flow from high inactive gas concentration areas to the exterior space without increasing complexity and cost, particularly when using self-propelling transport devices that require automatic opening and closing of conveyance ports.
Innovation Solution
A storage facility design with a first opening for container movement, featuring a first inlet opening adjacent to the edge of the opening and a drawing-in device that directs air from the high inactive gas area into a discharge space outside the holding area, reducing air flow to the exterior space without a manually operable door.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a door is provided at the conveyance port to prevent air flow from holding space to exterior space, then air flow control is improved, but device complexity and cost increase due to actuators and controllers
Solution Approach 1:
The harmful element (door mechanism with actuator and controller) is extracted and removed from the system. Instead of using a mechanical door to control air flow, the invention uses a drawing-in device that actively draws air from the exterior space into the discharge space, eliminating the need for complex opening/closing mechanisms while still achieving air flow control.
Solution Approach 2:
A drawing-in device is introduced as an intermediary element between the exterior space and discharge space. This device mediates the air flow control by actively drawing air through the inlet opening, replacing the need for a door mechanism and its associated control systems.
2Object-affected harmful factors
If a door with actuator and controller is provided for automatic opening and closing, then air flow control is improved, but manufacturing cost increases
Solution Approach 1:
The expensive door mechanism with actuator and controller is extracted and removed from the system. The invention replaces this complex mechanical system with a simpler drawing-in device that achieves the same air flow control function without requiring expensive components.
Solution Approach 2:
The invention uses a simpler, more cost-effective drawing-in device instead of an expensive door mechanism with actuators and controllers. This replacement reduces manufacturing costs while maintaining the essential air flow control function.
3Productivity
If the conveyance port remains open for container transport, then productivity is improved, but air flow from holding space to exterior space increases
Solution Approach 1:
The conveyance port remains continuously open to allow uninterrupted container transport, maintaining high productivity. Simultaneously, the drawing-in device operates continuously to draw air from the exterior space, preventing the open port from causing harmful air flow from the holding space to the exterior space.
Solution Approach 2:
The drawing-in device acts as an intermediary that compensates for the open conveyance port. By actively drawing air through the inlet opening, it prevents the natural air flow that would occur from the holding space through the open port to the exterior space, thus maintaining both productivity and air flow control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively minimizes air flow from the holding space to the exterior space, maintaining a safe work environment while avoiding increased complexity and cost, by utilizing a drawing-in device to redirect air through an inlet opening and into a discharge space.
Implementation Method 1
a first drawing-in device is provided to discharge air drawn in through the first inlet opening into discharge space which is outside the holding space and is divided off from the exterior space
Data Source
AI summary
A storage facility for semiconductor containers is provided. The storage structure has partitioning walls including a side wall portion extending along a vertical direction, and holding space partitioned off from exterior space by the partitioning walls. Inactive gas enriched air, which contains higher concentration of inactive gas than concentration of inactive gas contained in air in the exterior space, is supplied to the holding space. A first opening for allowing containers being carried into and out of the storage structure to be moved through the side wall portion is formed in the side wall portion. A first inlet opening is located at a position in the exterior space and adjacent an edge of the first opening. A first drawing-in device is provided to discharge air drawn in through the first inlet opening into discharge space which is outside the holding space and is divided off from the exterior space.