Semiconductor Strain Sensing Film With Integrated Temperature Compensation
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Solution Overview
Problem
Existing pressure sensors face challenges in resisting external environment interference and achieving accurate pressure measurement due to the need for precise manufacturing and assembly, and lack of integrated temperature sensing capabilities.
Innovation Solution
A strain sensing film with a semiconductor film incorporating a temperature sensor and a signal processing circuit that adjusts sensitivity based on a correlation between effective gauge factor and temperature, using a Wheatstone bridge or half-Wheatstone bridge configuration with resistors and electrodes, to enhance anti-interference and accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If pressure sensors use complex circuit design and structural design (resistance strain gauge type, capacitive sensing type, or piezoelectric ceramic type), then pressure measurement capability is achieved, but manufacturing precision requirements increase and assembly accuracy must be extremely high
Solution Approach 1:
The patent combines the temperature sensor and strain sensing film into a single integrated structure, where the temperature sensor is arranged directly in the semiconductor film. This merging eliminates the need for separate temperature measurement components and their associated complex circuit designs, thereby reducing manufacturing and assembly accuracy requirements while maintaining pressure measurement capability.
Solution Approach 2:
The semiconductor film serves multiple functions: it acts as both the strain sensing element and the substrate for the temperature sensor. This multi-functionality reduces the overall system complexity and the precision requirements for manufacturing and assembly, as fewer separate components need to be precisely positioned and assembled.
2Reliability
If pressure sensors determine temperature through external temperature information, then temperature data is obtained, but anti-interference to external environment interference weakens and pressure measurement accuracy decreases
Solution Approach 1:
The patent introduces an integrated temperature sensor as an intermediary element that directly measures the temperature at the sensor location. This internal temperature measurement serves as a mediator to compensate for temperature effects on the strain gauge, thereby improving both anti-interference capability and pressure measurement accuracy without relying on external temperature information.
Solution Approach 2:
The temperature sensor provides real-time temperature feedback to the signal processing circuit, which then adjusts the strain measurement accordingly. This feedback mechanism enables continuous compensation for temperature effects, improving the reliability and accuracy of pressure measurements in varying environmental conditions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides enhanced resistance to environmental interference and improves pressure measurement accuracy by compensating for temperature effects, allowing for precise strain and force detection.
Implementation Method 1
a temperature sensor is arranged in the semiconductor film
Implementation Method 2
a bridge contact electrode connected with a Wheatstone bridge or a half-Wheatstone bridge, and configured for outputting a bridge voltage signal
Implementation Method 3
one resistor and at least another resistor respond differently to a strain
Data Source
AI summary
The present application discloses a strain sensing film, a pressure sensor, and a strain sensing system; the strain sensing film includes a semiconductor film, and by arranging a temperature sensor in the semiconductor film, the sensitivity of the strain sensing film is adjusted according to an effective gauge factor obtained from a calibration test and a correlation table reflecting a correlation between an effective gauge factor and a temperature, a better effective gauge factor compensation is achieved, a high sensitivity of the strain gauge of the semiconductor film can be fully utilized. The strain sensing film can be widely used in application scenarios that need to measure local strain or strain variation, force or force variation, pressure or pressure change, displacement, deformation, bending, or bending deformation.