Semiconductor Module Control Under Submodule Failure Thresholds
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Solution Overview
Problem
Semiconductor manufacturing apparatuses experience downtime and reduced throughput due to failures in submodules, leading to inefficiencies in operation when the entire system is stopped for maintenance.
Innovation Solution
A method for controlling the operation of semiconductor manufacturing apparatuses that involves judging submodule failures, assessing alternative operational submodules, calculating throughput thresholds, and continuing operation if the throughput remains above a predetermined level, allowing the system to operate while stopping the failed submodule.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the whole semiconductor manufacturing apparatus is stopped for restoration when a submodule fails, then the reliability is improved, but the productivity deteriorates due to downtime
Solution Approach 1:
The semiconductor manufacturing apparatus is divided into multiple independent processing modules, each comprising multiple submodules. When a failure occurs in one submodule, only that specific submodule is stopped while other submodules within the same processing module and other processing modules continue to operate. This segmentation allows the system to isolate failures without halting the entire apparatus, thereby maintaining productivity while ensuring reliability through targeted restoration.
2Productivity
If the failed submodule is stopped and other submodules continue operation, then the productivity is maintained, but the reliability deteriorates due to continued operation with reduced capacity
Solution Approach 1:
The system continuously monitors the operation status of each submodule and dynamically adjusts the operational configuration based on failure conditions. When a submodule fails, the control unit detects this condition and automatically reconfigures the system to operate with the remaining functional submodules. This feedback mechanism ensures that the system maintains optimal reliability by adapting its operational state in response to actual conditions, while preserving productivity through continuous operation of available resources.
3Reliability
If the throughput threshold is set high, then the reliability is improved by ensuring adequate capacity, but the productivity deteriorates by restricting operation in marginal cases
Solution Approach 1:
The system dynamically adjusts the throughput threshold parameter based on the specific failure condition and the operational status of remaining submodules. Rather than using a fixed high threshold that would restrict operation in all marginal cases, the threshold is adapted to the current system state. This allows the system to maintain adequate reliability guarantees while preserving operational flexibility to continue production even when throughput is reduced, by adjusting the decision criterion to match actual capacity availability.
Data Source
AI summary
When a failure has occurred in a semiconductor manufacturing apparatus, lowering of throughput thereof is suppressed. A method for controlling operation of a semiconductor manufacturing apparatus, which comprises one or plural processing modules and each processing module comprises plural submodules, comprises steps for: judging whether a failure has occurred in at least one of the plural submodules; judging whether at least one submodule which is not in a failed state exists in a processing module to which the failed submodule belongs; obtaining throughput in a state that the one or plural processing modules are controlled to perform operation while the failed submodule is controlled to stop its operation; judging whether the throughput is larger than a predetermined threshold; and continuing operation of the one or plural processing modules while controlling the failed submodule to stop its operation, in the case that the throughput is larger than the predetermined threshold.