Semiconductor Substrate Electromagnetic Shielding for Vibrator Devices
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Solution Overview
Problem
Existing oscillators are susceptible to electromagnetic noise, which can cause defects such as abnormal oscillation and signal quality deterioration due to external electromagnetic interference.
Innovation Solution
A vibrator device with a semiconductor substrate and a lid, both made of P-type semiconductor material, are directly bonded to form an airtight cavity around the quartz crystal element, providing an electromagnetic shield and minimizing external noise interference.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a quartz vibrator element is housed in a cavity formed by bonding substrates, then the vibrator element can be protected from external environments, but electromagnetic noise can enter and be superimposed on electrodes and wirings, causing abnormal oscillation and signal quality deterioration
Solution Approach 1:
The patent converts the semiconductor substrate into a dual-functional component: it serves as both the mounting base for the vibrator element and as an electromagnetic shield. By forming a conductive structure that extends from the mounting surface to the outer surface of the substrate, the patent transforms the substrate from a passive mechanical support into an active electromagnetic noise barrier, utilizing the conductive property to block harmful electromagnetic fields while protecting the enclosed vibrator element
Solution Approach 2:
The semiconductor substrate is designed to perform multiple functions simultaneously: mechanical support for the vibrator element, electrical connection through conductive structures, and electromagnetic shielding. This multi-functionality eliminates the need for separate shielding components, reducing overall device complexity while maintaining protection against electromagnetic noise
2Object-affected harmful factors
If conventional oscillators use separate shielding structures, then electromagnetic noise can be suppressed, but device complexity and size increase due to additional components like decoupling capacitors
Solution Approach 1:
The patent merges the electromagnetic shielding function with the semiconductor substrate itself, eliminating the need for separate shielding components. The conductive structure is integrated directly into the substrate, combining mechanical support, electrical connection, and electromagnetic shielding functions into a single unified component, thereby reducing device complexity and component count
Solution Approach 2:
The patent extracts the electromagnetic shielding function from traditional external components (such as decoupling capacitors and separate shields) and integrates it directly into the semiconductor substrate. This extraction and integration approach simplifies the overall device architecture by removing unnecessary external components while maintaining effective noise suppression
3Object-affected harmful factors
If conventional oscillators use multiple separate components for mounting and shielding, then functionality can be achieved, but the device size increases preventing miniaturization
Solution Approach 1:
The patent combines multiple functions (mounting, electrical connection, and electromagnetic shielding) into the single semiconductor substrate structure. The conductive structure is formed as an integral part of the substrate, eliminating the need for separate shielding components and enabling significant reduction in device volume while maintaining effective electromagnetic noise protection
Solution Approach 2:
The patent implements a nested structure where the vibrator element is enclosed within a cavity formed by the semiconductor substrate and lid. The conductive structure is nested within the substrate, extending from the mounting surface to the outer surface, creating a compact layered arrangement that maximizes protection while minimizing overall device size
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively suppresses electromagnetic noise, preventing defects like abnormal oscillation and signal degradation, while also reducing the need for external decoupling capacitors, thus enhancing the reliability and miniaturization of the oscillator.
Implementation Method 1
A vibrator device with a semiconductor substrate and a lid, both made of P-type semiconductor material, are directly bonded to form an airtight cavity around the quartz crystal element, providing an electromagnetic shield and minimizing external noise interference
Implementation Method 2
an oscillator using a crystal unit is known and is widely used as a reference frequency source and an oscillation source of various electronic apparatuses
Data Source
AI summary
A vibrator device including a vibrator element, an IC substrate including a semiconductor substrate configured of a semiconductor having a first conductive type and a circuit electrically coupled to the vibrator element, the first conductive type being any one of an N-type and a P-type, and a lid directly bonded to the semiconductor substrate and configured of a semiconductor having the first conductive type.