Semiconductor Test Structure for Interference Detection

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Solution Overview

Problem

The miniaturization of semiconductor dies has led to integration challenges in testing, as various types and dimensions of semiconductor dies with different functions are packaged together, making it difficult to detect interference or compatibility issues effectively.

Innovation Solution

A test structure with a load board featuring shared and independent connectors is used, where semiconductor dies are placed on sockets connected to these connectors, allowing for simultaneous application of test signals and reading of signals to determine if one die is disturbed by another, with an interposer optionally inserted to equalize signal paths.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multiple semiconductor dies are integrated and packaged together to achieve miniaturization, then the functionality and integration density are improved, but the difficulty of detecting interference or compatibility issues between dies increases

Engineering Contradiction:
Improveintegration densityVSAvoidinterference detection difficulty
Core Design Contradiction:
Adaptability or versatilityVSDifficulty of detecting and measuring

Solution Approach 1:

The test system is segmented into independent test channels, each with dedicated signal paths and connectors for individual semiconductor dies. This segmentation allows independent testing of each die while packaged together, enabling detection of interference issues without requiring physical separation of the dies.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

An interposer is introduced as an intermediary component between the semiconductor dies and the test board. The interposer provides isolated signal paths and electrical connections, enabling separate testing of each die while maintaining their packaged configuration. This intermediary structure facilitates the detection of interference issues between adjacent dies.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Adaptability or versatility

If various types and dimensions of semiconductor dies are packaged together in a single module, then the functionality is improved, but the complexity of the testing system increases

Engineering Contradiction:
ImprovefunctionalityVSAvoidtesting system complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The test board and interposer are designed with universal, standardized connectors and signal path configurations that can accommodate various types and dimensions of semiconductor dies. This multi-functional design allows the same testing infrastructure to test different die configurations without requiring custom test fixtures for each die type.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The testing system uses segmented, modular architecture where each semiconductor die has its own dedicated test channel and signal path. This modular segmentation simplifies the overall system complexity by breaking down the testing process into independent, manageable units that can be configured for different die types.

Inventive Principle:
Principle #1Segmentation

3Reliability

If semiconductor dies are tested in their packaged configuration, then the realism of the test environment is improved, but the ability to isolate and identify interference sources worsens

Engineering Contradiction:
Improvetest environment realismVSAvoidinterference source identification
Core Design Contradiction:
ReliabilityVSDifficulty of detecting and measuring

Solution Approach 1:

The interposer serves as a mediator that maintains the packaged configuration of semiconductor dies while providing isolated signal paths to the test board. This allows testing in the realistic packaged environment while the interposer's separate connection points enable isolation of individual dies for identifying interference sources.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The signal paths are segmented into separate, isolated channels for each semiconductor die, even though the dies remain in their packaged configuration. This segmentation allows the test system to measure signals from each die independently, enabling identification of interference sources while maintaining test environment realism.

Inventive Principle:
Principle #1Segmentation

Data Source

PatentUS11726138B2Method for testing semiconductor dies and test structure
Publication Date: 2023.08.15 NAN YA TECH
  • US11726138B2 patent drawing
  • US11726138B2 patent drawing
  • US11726138B2 patent drawing

AI summary

A method includes providing a test structure above a tester, wherein the test structure includes a load board including a first and second connectors, a first socket electrically connected to the first and second connectors of the load board, and a second socket electrically isolated from the first connector of the load board and electrically connected to the second connector of the load board. A first and second semiconductor dies are disposed respectively on the first and second sockets. A test signal to the first semiconductor die and the second semiconductor die through the second connector of the load board are simultaneously applied by using the tester. A first signal of the first semiconductor die through the first connector is read by using the tester. Whether the first semiconductor die is disturbed by the second semiconductor die is determined according to the first signal.