Semiconductor Test Method Adjusting On-Time for Uniform Current
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Solution Overview
Problem
Existing semiconductor device testing methods face challenges in accurately evaluating the quality of semiconductor devices, particularly in ensuring uniform current flow during turn-off, which affects the detection of defects and efficiency of the testing process due to variations in delay time and in-plane current variations.
Innovation Solution
A test device and method that adjusts the on-time and inductive component of the coil to ensure uniform current flow across regions of the semiconductor device, using a test control unit to determine the optimal on-time based on delay time variations and selecting the appropriate inductive component to reach a predetermined test current, thereby enabling accurate defect detection and efficient testing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the testing is performed without adjusting on-time and inductive component, then the testing process is simple, but the current flow is non-uniform and defect detection accuracy is poor
Solution Approach 1:
The patent implements dynamic adjustment of the on-time parameter and inductive component based on measured delay time variations. The test control unit modifies these parameters in real-time to compensate for manufacturing variations, ensuring uniform current flow across different regions of the semiconductor device during testing.
Solution Approach 2:
The patent changes physical parameters (on-time duration and inductive component value) to optimize the testing conditions. By adjusting these parameters based on delay time measurements, the system achieves uniform current distribution and improves defect detection accuracy without requiring complex hardware modifications.
2Stability of the object's composition
If the on-time is extended to ensure uniform current flow, then current uniformity improves, but testing time increases
Solution Approach 1:
The patent performs preliminary measurements of delay time and in-plane current variations before the actual testing. Based on these preliminary data, the test control unit pre-calculates and sets the optimal on-time and inductive component values, allowing the main testing to proceed efficiently without unnecessary time extension.
Solution Approach 2:
The patent employs feedback mechanisms where the test control unit continuously monitors current flow uniformity and adjusts the on-time and inductive component in real-time. This closed-loop control ensures current uniformity is achieved with minimal time extension, preventing excessive testing duration.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method ensures high accuracy in testing semiconductor devices by ensuring uniform current flow and optimizing the testing time, improving defect detection rates and reducing the likelihood of false negatives or inefficiencies in the testing process.
Implementation Method 1
inductive component of the coil
Data Source
AI summary
Provided is a test method of a semiconductor device under test, the test method comprising: controlling the semiconductor device under test to an on state by inputting a control signal to the semiconductor device under test; and observing the semiconductor device under test at a time of controlling the semiconductor device under test in the on state to an off state and evaluating the semiconductor device under test, wherein the semiconductor device under test includes one semiconductor device under test or a plurality of semiconductor devices under test, and in the controlling to the on state, a length of an on-time for which the one semiconductor device under test or the plurality of semiconductor devices under test are set to the on state is adjusted based on a magnitude of a variation in a delay time of the control signal.