Semiconductor Test Apparatus Waveform Data Acquisition
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Solution Overview
Problem
Conventional semiconductor test apparatuses lack the capability to continuously acquire and associate large amounts of power supply voltage and current waveform data in real-time with test items during the execution of a test plan, requiring additional hardware like oscilloscopes.
Innovation Solution
A test apparatus comprising a test module, a waveform data acquisition module that converts electrical signals into digital signals, and a higher-level controller to collect and associate waveform data with the operation state of the test module, allowing continuous data acquisition without time constraints and integration with pass/fail data sequences.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If additional hardware components such as oscilloscopes are provided to acquire waveform data in parallel with the semiconductor test apparatus, then waveform data acquisition capability is improved, but device complexity and cost increase
Solution Approach 1:
The patent integrates the waveform data acquisition function directly into the test apparatus by incorporating an A/D converter and waveform data acquisition module within the existing test system. This merging eliminates the need for separate oscilloscopes and external hardware, resolving the contradiction by improving waveform acquisition capability while reducing device complexity and cost.
Solution Approach 2:
The test apparatus is designed to perform multiple functions: executing test plans for pass/fail judgment and simultaneously acquiring waveform data through the integrated A/D converter and memory units. This multi-functionality allows the single device to replace what would traditionally require separate specialized equipment, thereby improving measurement capability without increasing overall device complexity.
2Loss of information
If waveform data is acquired continuously in parallel with test plan execution, then data completeness and analysis value are improved, but loss of time and synchronization complexity increase
Solution Approach 1:
The waveform data acquisition operates continuously throughout the entire test process without interruption. The A/D converter continuously samples analog signals and stores them in memory units while the test plan executes, ensuring no waveform data is missed. This continuous acquisition improves data completeness while the automated synchronization mechanism prevents time loss by automatically associating waveform data with corresponding test items.
Solution Approach 2:
The system uses feedback mechanisms to synchronize waveform data with test plan execution. The higher-level controller monitors test progress and uses this feedback to properly time-stamp and associate acquired waveform data with the corresponding test items, eliminating synchronization issues and time loss while maintaining complete data records.
3Loss of information
If waveform data is acquired and associated with test items within the test apparatus, then data association capability and analysis value are improved, but device complexity increases
Solution Approach 1:
The data association function is merged into the higher-level controller that already exists in the test apparatus for coordinating test plan execution. The controller automatically links waveform data with corresponding test items using time-stamping and synchronization mechanisms, improving data association capability without requiring separate complex association hardware or software systems.
Solution Approach 2:
The test apparatus performs self-service data association through its higher-level controller, which automatically correlates waveform data with test plan execution without requiring external post-processing tools or additional complexity. The system autonomously timestamps and links data based on its own internal timing and control signals, resolving the contradiction by improving data association while avoiding external complexity additions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the continuous acquisition and association of waveform data with test items, providing detailed analysis and supporting big data generation for defect analysis and process improvement in semiconductor testing.
Implementation Method 1
a waveform data acquisition module structured to convert an electrical signal relating to the device under test into a digital signal with a predetermined sampling rate, and to acquire waveform data which is a sequence of the digital signal
Data Source
AI summary
A test site includes: at least one test module that tests a device under test; and a waveform data acquisition module that converts an electrical signal relating to the DUT into a digital signal with a predetermined sampling rate so as to acquire waveform data in the form of a digital signal sequence. The higher-level controller controls the at least one test module and the waveform data acquisition module, and collects the waveform data acquired by the waveform data acquisition module in a form associated with the operation state of the at least one test module.