Semiconductor Test Apparatus Waveform Data Acquisition
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Solution Overview
Problem
Conventional semiconductor test apparatuses lack the capability to continuously acquire waveform data such as power supply voltage or current in parallel with DC tests without additional hardware, making it difficult to analyze the state of semiconductor devices effectively.
Innovation Solution
A test apparatus comprising a waveform data acquisition module with an A/D converter and memory units, controlled by a higher-level controller to align and store data with the progression of a pattern program, allowing simultaneous data sampling and storage of power supply current and voltage waveforms.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If additional hardware components such as an oscilloscope are provided to acquire waveform data, then waveform data acquisition capability is improved, but device complexity increases
Solution Approach 1:
The patent merges the waveform data acquisition function into the test apparatus itself by integrating an A/D converter and memory unit. This allows the test apparatus to simultaneously perform DC tests and acquire waveform data without requiring external oscilloscopes or additional hardware components, thereby resolving the contradiction between measurement capability and device complexity.
Solution Approach 2:
The test apparatus is designed with multi-functionality to perform both DC testing and waveform data acquisition using integrated components. The A/D converter and memory unit enable the apparatus to handle multiple measurement tasks (voltage, current, waveform capture) without requiring separate dedicated hardware for each function, thus improving versatility while controlling complexity.
2Loss of information
If waveform data is acquired in parallel with DC test without time constraints, then data acquisition completeness is improved, but device complexity increases
Solution Approach 1:
The patent combines the waveform data acquisition system with the DC test system through shared control and integrated memory resources. The memory unit stores both DC test results and waveform data, while the control unit coordinates both measurement processes, enabling complete data acquisition without time constraints while avoiding the complexity of entirely separate systems.
Solution Approach 2:
The control unit acts as an intermediary that coordinates between the DC test operations and waveform data acquisition. It manages the timing and data flow between different measurement functions, ensuring that both DC tests and waveform capture can proceed in parallel without conflict, thereby achieving complete data acquisition through centralized coordination rather than complex distributed control.
3Loss of information
If waveform data is associated with pattern program progress, then analysis capability is improved, but data processing complexity increases
Solution Approach 1:
The control unit implements feedback mechanisms that track the progress of pattern programs and automatically associate waveform data with corresponding test stages. By monitoring pattern program execution status and using this information to tag and organize waveform data, the system achieves enhanced analysis capability through automated data correlation rather than manual processing, thus improving the benefit while controlling complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables continuous acquisition of waveform data without time constraints, providing valuable information on the device under test by associating the data with the progress of the pattern program, thereby enhancing the analysis and defect detection capabilities.
Implementation Method 1
a waveform data acquisition module 140 which includes an A/D converter 152 for converting the electrical signal into a digital signal with a predetermined sampling rate
Data Source
AI summary
A waveform data acquisition module includes an A/D converter that converts an electrical signal relating to a DUT into a digital signal, and a first memory unit that stores waveform data configured as a digital signal sequence. A function test module includes a test unit and a second memory unit. A higher-level controller instructs the waveform data acquisition module to start data sampling, and holds the time point thereof. Furthermore, the higher-level controller instructs the function test module to start to execute a pattern program, and records the time point thereof. The first memory unit records the time point at which the data sampling is started. The higher-level controller records the time point at which the execution of the pattern program is started.