Semiconductor Testing Device Using Electrostatic Carrier
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Solution Overview
Problem
Conventional semiconductor product testing processes result in damage and increased costs due to manual handling and the need for multiple trays for different sizes, leading to inefficiencies and high risk of product destruction during transfer and testing.
Innovation Solution
A semiconductor product testing device utilizing an electric static carrier with a movable carrier plate and electric static circuit that retains products via static electricity, allowing for direct probing and reduced handling, enabling automatic testing without physical movement and supporting various product sizes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If semiconductor products are placed in trays with recesses for transfer and testing, then the products can be held and moved, but the products are easily destroyed due to collision with recess walls and require multiple trays for different sizes
Solution Approach 1:
The patent replaces the mechanical tray-with-recesses system with an electric field-based holding system. The carrier plate generates static electricity to attract and hold semiconductor products, eliminating the need for physical recesses and manual placement. This substitution removes the collision risk with recess walls while maintaining secure holding during transfer and testing operations.
Solution Approach 2:
The patent changes the physical state from mechanical constraint (physical recesses) to electrostatic attraction (static electricity). By controlling the electrical parameter (static charge) on the carrier plate, the system can dynamically adjust holding force and release products when needed, providing both secure holding and easy release without physical contact or damage.
2Productivity
If manual or robotic operations are used to move wafers or chips from carrier to testing tool, then the testing process can be performed, but more time is consumed and manufacturing cost increases
Solution Approach 1:
The patent merges the carrier plate with the testing tool by making the carrier plate movable and integrating it directly into the testing apparatus. The semiconductor products remain on the carrier plate throughout the entire testing process, eliminating the need to transfer them to separate testing equipment. This integration removes intermediate transfer steps and significantly reduces cycle time.
Solution Approach 2:
The patent enables continuous testing operations by keeping semiconductor products on the carrier plate throughout the entire testing process. The movable carrier plate allows the testing tool to access products directly on the carrier without interruption or transfer, maintaining continuous productive action and eliminating idle transfer time between operations.
3Adaptability or versatility
If multiple trays are used for different sizes of semiconductor products, then various product sizes can be accommodated, but device complexity and manufacturing cost increase
Solution Approach 1:
The patent creates a universal carrier plate that can accommodate semiconductor products of various sizes through electrostatic attraction. The single carrier plate design replaces multiple size-specific trays, as the electric field can hold products regardless of their dimensions. This multi-functional carrier provides both small and large product compatibility while reducing the total number of components needed.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution significantly reduces the risk of product damage, simplifies the transfer process, and allows for automatic testing, maintaining product integrity and accommodating diverse sizes without physical contact or falling, thereby enhancing manufacturing efficiency and reducing costs.
Implementation Method 1
the movable carrier plate being arranged with at least one electric static circuit for generating static electricity to suck the at least one semiconductor product
Data Source
AI summary
A semiconductor product testing device using an electric static carrier includes a movable carrier plate serving to carry at least one semiconductor product for transferring or testing process; the movable carrier plate being arranged with at least one electric static circuit to suck the at least one semiconductor product; a movable detecting probe set including: a probe set includes at one probe or a plurality of probes; a robot being connected to the probe set for deriving the probe set to a predetermined test position; a control device connected to the robot and including a control circuit for controlling movements of the robot and a testing circuit; and a computer connected to the control device for getting testing data from the testing circuit; the computer providing functions to cause the user to determine test items and ways of the testing circuit and the moving paths of the robot.


