Semiconductor Tool Data Sharing for Cross-Equipment Quality Alignment
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Solution Overview
Problem
Existing semiconductor manufacturing systems face challenges in maintaining consistent quality due to individual differences in manufacturing apparatuses and varying installation environments, requiring costly and time-consuming adjustments and the introduction of dedicated systems for parameter comparison.
Innovation Solution
A semiconductor system that enables direct communication between multiple manufacturing apparatuses, allowing them to share and analyze information on their states, generate correction values, and display visualization of analysis results to ensure consistent operation without the need for a dedicated system.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a dedicated system is introduced to connect and compare parameters of multiple semiconductor manufacturing apparatuses, then the quality variation of semiconductor devices is reduced, but the device complexity and system cost increase
Solution Approach 1:
The patent introduces a dedicated system as an intermediary that mediates between multiple semiconductor manufacturing apparatuses. This dedicated system collects, compares, and manages parameters from various apparatuses, enabling centralized control and quality consistency without requiring direct complex interconnections between all apparatuses. The mediator handles the complexity centrally while keeping individual apparatuses relatively simple.
2Manufacturing precision
If engineers manually check and adjust each semiconductor manufacturing apparatus, then the quality of semiconductor devices is maintained, but the loss of time and productivity decrease
Solution Approach 1:
The patent implements an automated feedback system where the dedicated system continuously collects parameter data from semiconductor manufacturing apparatuses, compares it against target values or historical data, and automatically generates adjustment instructions. This closed-loop feedback mechanism replaces manual checking and adjusting, maintaining quality consistency while significantly reducing the time required and improving overall productivity.
3Device complexity
If multiple semiconductor manufacturing apparatuses operate independently without direct communication, then the device complexity is reduced, but the manufacturing precision and quality consistency deteriorate
Solution Approach 1:
The patent creates a universal dedicated system that serves multiple semiconductor manufacturing apparatuses simultaneously. This single multi-functional system handles parameter collection, comparison, analysis, and adjustment generation for all connected apparatuses, providing centralized quality control without requiring individual complex communication infrastructure between each apparatus pair.
Data Source
AI summary
A semiconductor system shares information on a semiconductor manufacturing apparatus between first and second semiconductor manufacturing apparatuses through direct communication. The first semiconductor manufacturing apparatus includes a first acquisition unit acquiring first information on the first semiconductor manufacturing apparatus, a first storage unit storing the acquired first information, and a first communication unit sending the stored first information to the second semiconductor manufacturing apparatus. The second semiconductor manufacturing apparatus includes a second acquisition unit acquiring second information on the second semiconductor manufacturing apparatus, a second storage unit storing the acquired second information, a second communication unit receiving the first information sent from the first semiconductor manufacturing apparatus, an analysis unit analyzing a state of the second semiconductor manufacturing apparatus based on the received first information and the stored second information, an information generation unit generating information visualizing an analysis result, and a display unit displaying the generated information.