Semiconductor Tool Configuration Using Sensor-Requirement Matching

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Solution Overview

Problem

The existing semiconductor manufacturing apparatus design process is prone to human error and time-consuming, requiring manual creation of program and sensor setting files to conform to user specifications, which can lead to inconsistencies and necessitate redesigns if specifications change.

Innovation Solution

A method and program for automatically creating a program setting file and sensor setting file based on user requirements, specifying sensors through operations like rotating polishing tables at different speeds, and confirming consistency between requirement and sensor settings to ensure accurate and efficient design.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If manual creation of program and sensor setting files is performed to conform to user specifications, then the semiconductor manufacturing apparatus can be customized according to user requirements, but human error occurs and the design period is extended

Engineering Contradiction:

Improvecustomization according to user requirementsVSAvoidhuman error

Core Design Contradiction:

Adaptability or versatilityVSReliability

Solution Approach 1:

The patent replaces manual mechanical processes with an automated computer-based system. A program automatically reads user specifications, determines required sensors, creates program setting files, and generates installation instructions without human intervention, thereby eliminating human error while maintaining customization capability

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The system performs self-service by automatically determining sensor requirements based on user specifications and autonomously generating the necessary configuration files and installation instructions, eliminating the need for manual human analysis and file creation

Inventive Principle:

Principle #25Self-service

2Adaptability or versatility

If manual creation of program and sensor setting files is performed to conform to user specifications, then the semiconductor manufacturing apparatus can be customized according to user requirements, but the design period is extended for a long period of time

Engineering Contradiction:

Improvecustomization according to user requirementsVSAvoiddesign period

Core Design Contradiction:

Adaptability or versatilityVSLoss of time

Solution Approach 1:

The system performs preliminary action by pre-programming the logic that automatically translates user specifications into sensor requirements and configuration files. This automated framework is prepared in advance, enabling rapid generation of customized settings without time-consuming manual analysis for each new specification

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The patent replaces time-consuming manual processes with an automated computer-based system that rapidly generates configuration files and installation instructions, dramatically reducing the design period while maintaining full customization capability

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Adaptability or versatility

If manual determination of specification is performed based on specification document, then flexibility to accommodate specification changes is possible, but human error occurs and redesign is necessary

Engineering Contradiction:

Improveflexibility to accommodate specification changesVSAvoidspecification consistency

Core Design Contradiction:

Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The system incorporates feedback mechanisms that automatically verify whether created program setting files and sensor configurations correctly reflect the user specifications. This automated verification provides immediate feedback on specification consistency, eliminating human error while maintaining the ability to accommodate specification changes

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The patent replaces error-prone manual specification determination with an automated computer-based system that precisely translates user requirements into configuration files, ensuring manufacturing precision and specification consistency while maintaining flexibility for changes

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Data Source

PatentUS10890899B2Method of semiconductor manufacturing apparatus and non-transitory computer-readable storage medium storing a program of causing computer to execute design method of semiconductor manufacturing apparatus

Publication Date: 2021.01.12 EBARA CORP

AI summary

A design method of a semiconductor manufacturing apparatus which can satisfy a specification required by a user is disclosed. The design method of the semiconductor manufacturing apparatus includes creating a program setting file; creating a program installer from the program setting file; operating a processing unit of the semiconductor manufacturing apparatus; specifying a sensor corresponding to the processing unit based on the operation of the processing unit; creating a sensor setting file storing information obtained by specifying the sensor; comparing a content of a requirement specification and a content of the sensor setting file to confirm a consistency between the content of the requirement specification and the content of the sensor setting file; and introducing a program into a memory of a controller by the program installer when the content of the requirement specification and the content of the sensor setting file are consistent with each other.