Semiconductor Transport System With Constant Velocity Zones
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Solution Overview
Problem
Conventional substrate processing systems face inefficiencies and increased costs due to complex interface systems between processing tools, carriers, and material handling systems, leading to suboptimal loading and unloading processes in semiconductor fabrication facilities.
Innovation Solution
A semiconductor workpiece processing system is introduced, featuring a primary and secondary transport system with sections of constant velocity and queue sections, along with optimized interfaces between these systems, including a carrier design with passive magnetic locks and sealing configurations to maintain cleanliness and facilitate efficient substrate transfer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If complex interface systems are used between processing tools, carriers, and material handling systems, then substrate transfer capability is improved, but system complexity and costs increase
Solution Approach 1:
The patent merges the carrier interface design with the processing tool interface requirements, creating a unified interface system that eliminates the need for separate complex interface components. The carrier is designed with integrated features that directly interface with the processing tool, reducing the number of discrete interface elements and simplifying the overall system architecture.
Solution Approach 2:
The carrier interface is designed to serve multiple functions simultaneously: it provides mechanical support for the substrate, enables precise positioning, maintains cleanliness through sealing, and facilitates easy loading/unloading. This multi-functional design eliminates the need for separate specialized components for each function, thereby reducing system complexity while maintaining full substrate transfer capability.
2Ease of operation
If conventional interface systems are used for loading and unloading substrates, then substrate transfer is achieved, but inefficiencies and increased costs occur
Solution Approach 1:
The carrier is pre-configured with interface features and sealing mechanisms before entering the processing tool. The magnetic locks and sealing configurations are prepared in advance, allowing for rapid engagement and disengagement during loading and unloading operations. This preliminary preparation eliminates the need for complex real-time adjustments during substrate transfer, thereby improving processing efficiency.
Solution Approach 2:
The carrier's magnetic lock system automatically engages and disengages during loading and unloading operations without requiring external actuation or complex control mechanisms. The sealing features self-adjust to maintain cleanliness during the transfer process. This self-service capability simplifies the loading and unloading process while maintaining high processing efficiency.
3Ease of operation
If transport systems with frequent stops and starts are used, then substrate delivery to processing tools is achieved, but velocity variation increases leading to inefficiencies
Solution Approach 1:
The transport system is segmented into distinct functional zones: constant velocity transport sections for efficient substrate movement and queue sections for temporary holding and processing tool interface operations. This segmentation allows the transport system to maintain constant velocity during transit while providing dedicated areas for loading and unloading, thereby maintaining velocity stability without compromising substrate delivery capability.
Solution Approach 2:
Queue sections serve as intermediary zones between the constant velocity transport system and the processing tools. These queue sections buffer the velocity variations introduced during loading and unloading operations, allowing the main transport system to continue operating at constant velocity. The queue acts as a mediator that isolates the velocity disturbances from the primary transport flow.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system enhances processing efficiency by maintaining constant velocity transport flows, reducing contamination risks, and minimizing interface complexities, thereby improving the overall throughput and reducing costs in semiconductor fabrication.
Implementation Method 1
a carrier design with passive magnetic locks
Data Source
Figure 1~1B
Figure 2A
Figure 2B
AI summary
A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.