Semiconductor Valve Mounting Asymmetry for Correct Orientation
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Solution Overview
Problem
Substrate processing system valves, particularly three-way valves, are prone to incorrect orientation during installation due to their symmetric design, leading to improper gas flow and potential gas line contamination, which existing mistake-proofing solutions like changing connectors to male/female configurations are not backwards compatible and require significant redesign of the gas delivery system.
Innovation Solution
The introduction of asymmetric mounting holes and features, such as dowel pins, on the valve body and mounting brackets to ensure correct orientation, allowing only one correct installation position and maintaining compatibility with existing systems by minimizing design changes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If symmetric mounting features are used on valves, then the valve design is simple and manufacturing is easy, but the valve cannot be correctly oriented during installation
Solution Approach 1:
The patent applies asymmetry by providing mounting features (such as mounting holes or dowel pins) that are asymmetrically positioned on the valve body relative to the valve's flow direction. This asymmetric configuration allows the mounting features to define a unique correct orientation for the valve during installation, preventing incorrect installation while maintaining simplicity in the manufacturing process.
2Reliability
If asymmetric mounting features are introduced to prevent incorrect installation, then installation orientation correctness is improved, but device complexity increases
Solution Approach 1:
The patent introduces asymmetry through mounting features (mounting holes or dowel pins) positioned asymmetrically on the valve body. This approach improves installation orientation correctness by providing a unique correct installation position while minimizing increases in device complexity, as the asymmetric features are integrated into the existing valve structure without requiring major design changes.
3Reliability
If connectors are changed to male/female configuration to prevent incorrect installation, then installation orientation correctness is improved, but compatibility with existing systems is lost and system redesign is required
Solution Approach 1:
The patent applies asymmetry to mounting features (such as asymmetrically positioned mounting holes or dowel pins) rather than changing the connector configuration. This approach improves installation orientation correctness while maintaining backwards compatibility with existing systems, as the valve body and connectors retain their original symmetric design allowing interchangeability with legacy components.
Solution Approach 2:
The patent applies local quality by introducing asymmetry only in the mounting features (a localized area of the valve) rather than changing the overall connector design. This allows the mounting features to provide orientation guidance while the connectors maintain their original symmetric configuration for compatibility with existing gas delivery systems.
Data Source
AI summary
A valve comprising a valve body including an inlet, an outlet and a mounting surface. A first valve actuator is connected to the valve body. A plurality of mounting holes are formed in the mounting surface. The plurality of mounting holes are asymmetric relative to the mounting surface.