Semiconductor Wafer Shielding for Integrated Circuit EMI Protection

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Solution Overview

Problem

Integrating multiple functions in a single electronic circuit, such as a cell phone's transceiver and power amplifier circuits, poses a challenge in protecting components from electromagnetic disturbances, as conventional methods like metal covers are incompatible with manufacturing processes and result in increased bulk.

Innovation Solution

A device comprising a semiconductor wafer with a conductive layer connected to a support via conductive pillars, with an insulating region between, forms a metal cage around integrated circuit portions to shield against electromagnetic interference, compatible with existing manufacturing methods.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a metal cover is provided for each elementary electronic circuit to protect against electromagnetic disturbances, then electromagnetic protection is improved, but device complexity and manufacturing difficulty increase

Engineering Contradiction:
Improveelectromagnetic protectionVSAvoiddevice complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent merges the electromagnetic protection function with the existing semiconductor wafer structure by integrating a conductive layer directly onto the wafer surface. This eliminates the need for separate metal covers for each circuit, as the conductive layer provides unified electromagnetic shielding across multiple circuit portions while maintaining manufacturing compatibility.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The semiconductor wafer is given multiple functions: it serves as both the substrate for mounting integrated circuits and as the base for the conductive layer that provides electromagnetic protection. This multi-functional approach eliminates the need for additional dedicated protection structures, reducing overall device complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Reliability

If metal covers are provided to protect integrated circuits from electromagnetic disturbances, then electromagnetic protection is improved, but the device bulk increases

Engineering Contradiction:
Improveelectromagnetic protectionVSAvoiddevice bulk
Core Design Contradiction:
ReliabilityVSVolume of moving object

Solution Approach 1:

The conductive layer is nested directly onto the semiconductor wafer surface, utilizing the existing wafer volume rather than adding external metal covers. This nested integration provides electromagnetic shielding without increasing the overall device bulk, as the protection structure is embedded within the existing device footprint.

Inventive Principle:
Principle #7Nested doll (Nesting)

3Reliability

If metal covers are used to protect each elementary electronic circuit, then electromagnetic protection is improved, but compatibility with conventional manufacturing methods deteriorates

Engineering Contradiction:
Improveelectromagnetic protectionVSAvoidmanufacturing compatibility
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The electromagnetic protection function is merged into the semiconductor wafer fabrication process itself. The conductive layer is deposited and patterned using standard semiconductor manufacturing techniques during wafer production, eliminating the need for post-assembly metal cover installation and ensuring compatibility with conventional manufacturing workflows.

Inventive Principle:
Principle #5Merging (Combining)

4Adaptability or versatility

If multiple integrated circuits are integrated on the same package, then functional integration is improved, but electromagnetic interference between components increases

Engineering Contradiction:
Improvefunctional integrationVSAvoidelectromagnetic interference
Core Design Contradiction:
Adaptability or versatilityVSObject-affected harmful factors

Solution Approach 1:

The conductive layer is patterned to provide localized electromagnetic shielding over specific circuit portions that are sensitive to interference. This selective protection allows multiple integrated circuits to coexist on the same package with reduced mutual interference, as the shielding is applied precisely where needed rather than uniformly across the entire device.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution effectively protects integrated circuits from electromagnetic disturbances without the need for additional metal covers, reducing bulk and maintaining compatibility with conventional manufacturing processes.

Implementation Method 1

the device comprises a wafer of a semiconductor material covered with a conductive layer arranged parallel to the support, the wafer being connected to the support by conductive pillars distributed around each circuit portion and in contact with the conductive layer

Methodology Applied
Scientific EffectElectromagnetic shielding: Faraday Cage

Data Source

PatentUS7282906B2Electronic circuit protection device
Publication Date: 2007.10.16 STMICROELECTRONICS FRANCE
  • US7282906B2 patent drawing
  • US7282906B2 patent drawing
  • US7282906B2 patent drawing

AI summary

A device for protecting an electronic circuit comprising a support to which are attached at least two circuit portions, each comprising at least one integrated circuit chip. The device comprises a wafer of a semiconductor material covered with a conductive layer arranged parallel to the support, the wafer being connected to the support by conductive pillars distributed around each circuit portion and in contact with the conductive layer.