Semiconductor Optical Measurement with Selectable Wavelength Alignment
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Solution Overview
Problem
Existing measurement techniques for semiconductor devices struggle to accurately measure patterns with reduced line widths due to the need for high integration, lacking sufficient precision and versatility in wavelength selection and light source management.
Innovation Solution
A measurement apparatus with a light source assembly comprising multiple light sources and a mechanism for aligning and selecting specific wavelengths, combined with a filter assembly for adjusting light intensity, allows for precise measurement of semiconductor patterns by emitting light at various wavelengths and adjusting polarization states.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple light sources with different wavelengths are used to improve measurement versatility, then measurement precision and adaptability are improved, but device complexity increases
Solution Approach 1:
The light source assembly is segmented into multiple independent light sources (first light source, second light source, etc.), each emitting at different wavelengths. This segmentation allows selective activation of specific light sources based on measurement requirements, improving measurement precision for different semiconductor features while managing device complexity through modular design
Solution Approach 2:
The measurement apparatus is designed with multi-functional capability by incorporating multiple light sources that can emit different wavelengths. This universal design enables the same apparatus to measure various semiconductor features (line width, thickness, refractive index, surface roughness) using appropriate wavelength selection, thereby improving adaptability without requiring multiple separate devices
2Measurement precision
If a blocking panel with a hole is used to align and select specific light sources, then wavelength selection precision is improved, but device complexity increases
Solution Approach 1:
A blocking panel with a precisely positioned hole is introduced as an intermediary component between the multiple light sources and the optical path. This blocking panel acts as a mechanical selector that allows only the desired light source wavelength to pass through while blocking others, thereby achieving precise wavelength selection. The blocking panel serves as a simple yet effective mediator that manages light source selection without requiring complex electronic or optical switching mechanisms
3Measurement precision
If a filter assembly is added to adjust light intensity and wavelength, then measurement precision is improved, but device complexity and energy loss increase
Solution Approach 1:
The filter assembly is configured to pre-adjust the wavelength and intensity of light from the selected light source before the light reaches the semiconductor sample. By performing wavelength filtering and intensity modulation in advance (preliminary action), the system ensures that only the optimal wavelength range and appropriate intensity reach the sample, thereby improving measurement precision while minimizing energy waste from unnecessary wavelengths or excessive intensity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables non-destructive measurement of semiconductor device characteristics such as asymmetry, thickness, refractive index, and surface roughness with improved accuracy and versatility in wavelength selection, enhancing measurement precision and reliability.
Implementation Method 1
a light source assembly configured to emit light to a sample
Implementation Method 2
a polarizer configured to pass through light emitted from the light source assembly
Implementation Method 3
a measuring device configured to measure light reflected from the sample
Data Source
AI summary
A measurement apparatus includes a light source assembly configured to emit light to a sample, a measuring device configured to measure reflected light, and a stage on which the sample is provided, where the light source assembly includes a first plate, a plurality of light sources connected to the first plate and a blocking panel comprising a hole, and one of the plurality of light sources is aligned with the hole in a first direction.