Semiconductor Specimen Handling for Repeatable Wet Test Automation
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Solution Overview
Problem
There is a growing demand for an automated system to efficiently test small quantities and sizes of semiconductor wafers and materials in a research environment or laboratory, as manual experiments are prone to errors and uncertainties.
Innovation Solution
An automated system for testing semiconductor specimens, comprising a holder, container, gripper, robot, and test device with defined areas for processing, rinsing, and drying, equipped with sensors and temperature control, enabling automated manipulation and processing of semiconductor specimens.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If manual experimentation is used to test semiconductor specimens, then flexibility in handling various specimen types is maintained, but errors and uncertainties in experimental results increase
Solution Approach 1:
The system enables automated self-testing of semiconductor specimens through programmable control. The testing device automatically performs dipping, rinsing, drying, and measurement operations without human intervention, eliminating manual errors while maintaining consistent experimental procedures. The controller automates the entire workflow from specimen loading to result analysis.
2Reliability
If automated testing system is implemented, then errors and uncertainties in experimental results are reduced, but device complexity increases
Solution Approach 1:
The system integrates multiple testing functions (dipping, rinsing, drying, measuring) into a single unified automated device. The testing device combines a holder for specimen positioning, a gripper for automated handling, a robot for precise manipulation, and various processing areas (chemical, rinsing, drying) within one compact structure, reducing overall system complexity despite increased functionality.
Solution Approach 2:
The testing device is designed as a multi-functional automated system that can perform various semiconductor testing operations using the same core structure. The gripper can handle different specimen types, the holder can accommodate various configurations, and the processing areas can be used for different chemical treatments, making the complex device applicable to multiple testing scenarios.
3Stability of the object's composition
If automated manipulation is used for specimen handling, then consistency in experimental conditions is improved, but ease of operation decreases
Solution Approach 1:
The system replaces manual mechanical operations with automated robotic manipulation. The robot with end effector automatically performs precise positioning, dipping, and handling operations, ensuring consistent experimental conditions. The automated gripper and holder mechanisms eliminate variability introduced by manual handling, maintaining stable and repeatable experimental conditions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system reduces errors and uncertainties in experimental results by automating the testing process, allowing precise control over experimental conditions and repeated testing under consistent conditions.
Implementation Method 1
a heater configured to increase a temperature in the container
Implementation Method 2
a cooler configured to decrease the temperature in the container
Implementation Method 3
The cooler is configured to generate a vortex in the reservoir
Implementation Method 4
The holder may include an elastically deformable tongue configured to elastically support one side of the semiconductor specimen
Data Source
AI summary
An automated system for testing a semiconductor specimen may include: a holder configured to hold the semiconductor specimen; a container configured to hold a reagent; a gripper configured to grip the holder; a robot including an end effector configured to manipulate the gripper between a gripping mode and a release mode; and a test device configured to test the semiconductor specimen, and including: a load area where the container and the holder are loaded; a processing area where the holder is dipped into the reagent within the container using the end effector and rotated to chemically process the semiconductor specimen; a rinsing area where the holder and the semiconductor specimen are rinsed using the gripper connected to the end effector; and a drying area where the holder and the semiconductor specimen are dried using the gripper connected to the end effector.