Semiconductor X-ray Detector Segmentation for Heat Management

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current semiconductor X-ray detectors face challenges in large-area and high-pixel production due to cumbersome heat management, which limits their application in various imaging and inspection systems.

Innovation Solution

The semiconductor X-ray detector design incorporates an X-ray absorption layer with diodes or resistors, coupled with an electronics layer that includes a redistribution layer and direct or flip chip bonding, allowing for efficient charge carrier collection and processing without a scintillator, enabling the detection of X-ray photons and formation of images through direct conversion of X-rays into electric signals.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If semiconductor X-ray detectors use direct conversion of X-ray into electric signals, then spatial resolution and absorption efficiency are improved, but heat management becomes cumbersome making large-area detectors difficult to produce

Engineering Contradiction:
Improvespatial resolutionVSAvoidheat management complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The detector is divided into multiple independent pixel modules that can be tiled together to form large-area detectors. Each pixel module processes X-rays independently, allowing heat management to be localized rather than requiring cooling of an entire large-area detector, thus resolving the heat management complexity while maintaining high spatial resolution through direct conversion

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent transitions from planar pixel arrays to three-dimensional stacked architectures with multiple sensing layers. This vertical stacking allows heat to be dissipated through additional dimensions and surfaces, reducing thermal management complexity while maintaining high spatial resolution through the direct conversion mechanism in each layer

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Measurement precision

If semiconductor X-ray detectors use direct conversion of X-ray into electric signals, then absorption efficiency is improved, but device complexity increases making large-area production difficult

Engineering Contradiction:
Improveabsorption efficiencyVSAvoidlarge-area production ease
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

The detector is segmented into modular pixel units that can be manufactured independently and then assembled into large-area detectors. This segmentation allows standardization of manufacturing processes for each module, improving ease of production while maintaining high absorption efficiency through direct conversion in each module

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent designs universal pixel modules with standardized interfaces and functions that can be replicated and assembled to create detectors of various sizes. This universality simplifies manufacturing by using the same core components and processes across different detector configurations, making large-area production more feasible while preserving high absorption efficiency

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enhances the spatial resolution and absorption efficiency, facilitating the production of large-area detectors with multiple pixels, suitable for medical imaging, cargo scanning, and other applications by eliminating the need for bulky cooling mechanisms.

Implementation Method 1

A semiconductor X-ray detector may include a semiconductor layer that absorbs X-ray in wavelengths of interest. When an X-ray photon is absorbed in the semiconductor layer, multiple charge carriers (e.g., electrons and holes) are generated and swept under an electric field towards electrical contacts on the semiconductor layer.

Methodology Applied
Scientific EffectPhotoelectric Effect: Photoelectric Effect

Data Source

PatentEP3281040B1Semiconductor x-ray detector
Publication Date: 2021.11.24 SHENZHEN XPECTVISION TECH CO LTD
  • EP3281040B1 patent drawingFigure 1A
  • EP3281040B1 patent drawingFigure 1B
  • EP3281040B1 patent drawingFigure 2

AI summary

An apparatus suitable for detecting x-ray, comprising: an X-ray absorption layer (110) comprising an electrode; an electronics layer (120), the electronics layer (120) comprising: a substrate (122) having a first surface (124) and a second surface (128), an electronics system (121) in or on the substrate (122), an electric contact (125) on the first surface (124), a via (126), and a redistribution layer (RDL) (123) on the second surface (128); wherein the RDL (123) comprises a transmission line (127); wherein the via (126) extends from the first surface (124) to the second surface (128); wherein the electrode is electrically connected to the electric contact (125); wherein the electronics system (121) is electrically connected to the electric contact (125) and the transmission line (127) through the via (126).