Semiconductor Z-Axis Fluxgate Magnetometer Design
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Solution Overview
Problem
Existing fluxgate magnetometers are bulky, expensive, and limited to one-dimensional measurements, making it difficult to achieve three-dimensional magnetic field measurements, particularly in the z-axis direction, due to their complex and costly manufacturing processes and the challenge of aligning magnetic core structures for accurate 3D measurements.
Innovation Solution
A semiconductor z-axis fluxgate magnetometer is developed, which includes a semiconductor structure with a magnetic core and conductive pads, using a die with drive and sense circuits, and a non-conductive structure with metal layers forming coils around the magnetic core, allowing for efficient measurement of magnetic fields in the z-direction with reduced complexity and cost.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional fluxgate magnetometers are used for magnetic field measurement, then measurement capability is achieved, but device size becomes bulky and manufacturing cost increases
Solution Approach 1:
The patent transitions from traditional three-dimensional magnetic core structures to a planar two-dimensional configuration where the magnetic core lies flat on a substrate. This dimensional reduction allows the magnetometer to maintain measurement functionality while significantly decreasing device volume and enabling integration with standard semiconductor manufacturing processes
Solution Approach 2:
The patent replaces traditional mechanical wire-wound coils with planar trace structures formed through semiconductor fabrication processes. This substitution eliminates complex mechanical assembly, reduces device size, and enables cost-effective manufacturing through standard semiconductor industry techniques
2Measurement precision
If traditional fluxgate magnetometers are used, then magnetic field measurement is achieved, but manufacturing complexity and cost increase
Solution Approach 1:
The patent replaces traditional mechanical wire-winding and assembly processes with planar trace structures formed through standard semiconductor fabrication techniques such as photolithography, sputtering, and electroplating. This substitution dramatically simplifies manufacturing and reduces costs by leveraging existing semiconductor industry infrastructure
Solution Approach 2:
The patent designs the planar magnetic core and coil structures to be compatible with standard semiconductor manufacturing processes, allowing the same fabrication infrastructure to produce both the magnetic sensing elements and the associated electronic circuits, thereby reducing overall manufacturing complexity
3Measurement precision
If three-dimensional magnetic core structures are used for 3D magnetic field measurements, then measurement accuracy is improved, but alignment difficulty and manufacturing complexity increase
Solution Approach 1:
The patent resolves the alignment problem by flattening the three-dimensional magnetic core structures into two-dimensional planar configurations. This dimensional reduction allows all magnetic core elements to lie on the same substrate plane, eliminating the need for complex three-dimensional alignment and enabling straightforward integration using standard semiconductor manufacturing techniques
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The semiconductor z-axis fluxgate magnetometer provides a compact, cost-effective solution for measuring magnetic fields in the z-direction, enhancing sensitivity and simplifying the fabrication process while maintaining accuracy in 3D measurements.
Implementation Method 1
an alternating current waveform 210, which has an amplitude that is sufficient to drive magnetic core structure 114 into saturation, is input to drive coil 110 from drive circuit 120, an alternating magnetic induction field B, as represented by waveform 212, is generated in response
Implementation Method 2
magnetic core structure 114 is more easily saturated when magnetic core structure 114 is in alignment with the external magnetic field, and less easily saturated when magnetic core structure 114 is in opposition to the external magnetic field
Data Source
AI summary
A z-axis fluxgate magnetometer is formed in a semiconductor wafer fabrication sequence, which significantly reduces the size and cost of the fluxgate magnetometer. The semiconductor wafer fabrication sequence forms a vertical magnetic core structure, a first wire structure wound around the magnetic core structure, and a second wire structure wound around the magnetic core structure.