Semipolar Nanocrystal Surface-Emitting Lasers for Low-Threshold Green Emission

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Solution Overview

Problem

GaN-based vertical cavity surface-emitting lasers (VCSELs) face challenges in achieving low threshold current density and stable operation in the green wavelength range due to high electrical resistivity, defect densities, and lattice mismatch, limiting their application in visible and ultraviolet spectral ranges.

Innovation Solution

The development of all-epitaxial nanocrystal surface-emitting lasers (NCSELs) that operate without distributed Bragg reflectors, utilizing a nanocrystal array with a semipolar InGaN/AlGaN core-shell heterostructure, which reduces quantum-confined Stark effect and enhances carrier injection efficiency, allowing for efficient green wavelength emission.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If conventional c-plane GaN VCSELs are used, then the device structure is simple, but the quantum-confined Stark effect reduces radiative recombination rate resulting in higher thresholds and unstable operation

Engineering Contradiction:
Improvedevice structureVSAvoidoperation stability
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The patent transitions from conventional c-plane (symmetric) GaN VCSELs to semipolar-plane GaN VCSELs. This asymmetric orientation change reduces the quantum-confined Stark effect and polarization field, thereby improving radiative recombination rate and operational stability while maintaining device functionality.

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

The patent changes the crystal orientation parameter from c-plane to semipolar-plane, which fundamentally alters the physical properties including reduced polarization field and improved carrier confinement. This parameter change enables stable operation and green wavelength emission.

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If GaN-based VCSELs are developed for visible and ultraviolet ranges, then the spectral range is extended, but the large lattice mismatch between GaN and AlN/InN leads to high electrical resistivity and defect densities

Engineering Contradiction:
Improvespectral rangeVSAvoidelectrical resistivity and defect density
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The patent uses localized defect management strategies where dislocation filters are strategically positioned to confine defects to specific regions away from the active layer. This allows the active region to maintain high quality with low defect density while the overall device can tolerate the inherent lattice mismatch challenges.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent introduces AlInN barrier layers as intermediary structures between GaN layers with different compositions. These intermediate layers with graded composition reduce the abrupt lattice mismatch, thereby reducing dislocation density and electrical resistivity while enabling the structure to support green wavelength emission.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Use of energy by moving object

If DBRs are used in GaN-based VCSELs, then high reflectivity is achieved, but the large lattice mismatch and defect densities reduce the overall device performance

Engineering Contradiction:
ImprovereflectivityVSAvoiddevice performance
Core Design Contradiction:
Use of energy by moving objectVSReliability

Solution Approach 1:

The patent changes the DBR structure parameters by using AlInN/GaN alternating layers with optimized thicknesses and compositions. This parameter optimization achieves high reflectivity while minimizing the negative effects of lattice mismatch and defect propagation, enabling stable green laser operation.

Inventive Principle:
Principle #35Parameter changes

4Use of energy by moving object

If blue VCSELs are optimized, then the threshold current density is reduced, but the operating wavelength remains limited to 400-460 nanometers

Engineering Contradiction:
Improvethreshold current densityVSAvoidoperating wavelength
Core Design Contradiction:
Use of energy by moving objectVSAdaptability or versatility

Solution Approach 1:

The patent changes the emission wavelength parameter by adjusting the composition of the InGaN active layer. By controlling the indium content and quantum well structure, the emission wavelength is tuned from blue (400-460 nm) to green (500-560 nm) range while maintaining low threshold current density through the semipolar-plane structure.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

NCSELs achieve a threshold current density one order of magnitude lower than previous blue laser diodes, enabling stable operation in the green wavelength range (520-560 nm) with improved efficiency and resolution, and can be extended across the ultraviolet to deep visible spectrum without the limitations of high-quality DBRs.

Implementation Method 1

The large lattice mismatch between GaN and AlN (about 2.5 percent) and between GaN and InN (about 11 percent), together with the difficulty in achieving efficient p-type conduction, leads to GaN-based DBRs with high electrical resistivity, large densities of defects and dislocations, and relatively low reflectivity. In addition, the presence of a strong polarization field and the resulting quantum-confined Stark effect (QCSE) of conventional c-plane GaN devices further reduce the rate of radiative recombination

Methodology Applied
Scientific EffectQuantum-confined Stark effect:

Implementation Method 2

Electrically injected nanocrystal surface-emitting lasers (NCSELs) that do not necessarily use distributed Bragg reflectors (DBRs). In embodiments, the devices operate in a range of about 520-560 nanometers (nm), the green wavelength range

Methodology Applied
Scientific EffectStimulated emission: Laser

Data Source

PatentUS11909176B2Nanocrystal surface-emitting lasers
Publication Date: 2024.02.20 THE RGT UNIV OF MICHIGAN
  • US11909176B2 patent drawing
  • US11909176B2 patent drawing
  • US11909176B2 patent drawing

AI summary

An all-epitaxial, electrically injected surface-emitting green laser operates in a range of about 520-560 nanometers (nm). At 523 nm, for example, the device exhibits a threshold current density of approximately 0.4 kilo-amperes per square centimeter (kA/cm2), which is over one order of magnitude lower than that of previously reported blue laser diodes.