Sense Amplifier Layout Using Share Plug to Reduce Metal Density

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Solution Overview

Problem

As semiconductor sizes are scaled down, the increased density of metal lines in sense amplifiers becomes difficult to pattern, hindering the manufacturing process.

Innovation Solution

The layout of a sense amplifier incorporates a share plug to reduce the number and density of metal lines, simplifying the patterning process by decreasing the complexity of metal line arrangements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the size of semiconductors is scaled down to increase density, then the capacity and integration are improved, but the metal lines become more difficult to pattern

Engineering Contradiction:
Improvesemiconductor densityVSAvoidmetal line patterning
Core Design Contradiction:
ProductivityVSEase of manufacture

Solution Approach 1:

The patent combines multiple metal line functions into shared structures. Specifically, the bit line BL1 is shared between the first transistor TR1 and the second transistor TR2, and the bit line BL2 is shared between the third transistor TR3 and the fourth transistor TR4. This merging approach reduces the total number of metal lines required, thereby decreasing metal line density and improving patterning ease while maintaining high device density

Inventive Principle:
Principle #5Merging (Combining)

2Productivity

If more metal lines are used to support increased transistor density, then the circuit functionality is improved, but the patterning difficulty increases

Engineering Contradiction:
Improvetransistor densityVSAvoidmetal line arrangement
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent implements multi-functional metal lines that serve multiple purposes. The bit lines BL1 and BL2 are used by multiple transistors simultaneously, making them universal interconnects. This approach reduces the overall complexity of metal line arrangements by eliminating redundant lines while supporting increased transistor density through efficient resource sharing

Inventive Principle:
Principle #6Universality (Multi-functionality)

Data Source

PatentUS20190325943A1Layout of sense amplifier
Publication Date: 2019.10.24 UNITED MICROELECTRONICS CORP
  • US20190325943A1 patent drawing
  • US20190325943A1 patent drawing
  • US20190325943A1 patent drawing

AI summary

A layout of a sense amplifier includes a pre-charge and equalizer area. A pre-charge transistor, an equalizer transistor and a gate line are disposed within the pre-charge and equalizer area. The gate line and the pre-charge transistor share a share plug. The share plug serves as a gate contact plug for the gate line and a source/drain contact plug for the pre-charge transistor.