Sensing Substrate Layout for Electrostatic Shielding in X-Ray Detectors
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Solution Overview
Problem
X-ray flat panel detectors experience image unevenness due to inconsistent electric fields between pixels, caused by external potential disturbances and charged ions, leading to Mura and reduced imaging quality.
Innovation Solution
A sensing substrate design featuring a base substrate with a sensing unit that includes a sensing element with a light incident surface and a conductive pattern having a hollow portion and a transparent conductive portion. The conductive pattern is positioned to overlap with the side surface of the sensing element, providing electrostatic shielding and improving light transmittance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Illumination intensity
If transparent conductive materials are used for electrodes on the light incident side to maximize light transmittance, then light transmittance is improved, but electrostatic shielding capability deteriorates
Solution Approach 1:
The conductive layer is segmented into multiple patterns (first conductive pattern and second conductive pattern) with different transparency characteristics. The first conductive pattern has higher transparency for light transmittance, while the second conductive pattern provides electrostatic shielding. This segmentation allows each pattern to specialize in one function, resolving the contradiction between light transmittance and electrostatic shielding capability.
Solution Approach 2:
Different regions of the conductive structure are assigned different quality characteristics. The first conductive pattern located at the light incident side uses transparent conductive material to maximize light transmittance locally, while the second conductive pattern at the back surface uses highly conductive material to provide strong electrostatic shielding locally. This local quality differentiation resolves the contradiction by optimizing each region for its specific function.
2Object-affected harmful factors
If conventional conductive structures are used, then electrostatic shielding is provided, but light transmittance and photoelectric response sensitivity deteriorate
Solution Approach 1:
The conductive structure is divided into two separate patterns: the first conductive pattern made of transparent conductive material that maintains high light transmittance and photoelectric response sensitivity, and the second conductive pattern made of highly conductive material that provides strong electrostatic shielding. This segmentation allows both functions to coexist without compromising either light transmittance or electrostatic shielding capability.
Solution Approach 2:
The solution moves from a single-layer conductive structure to a multi-layer conductive structure with patterns at different depths and positions. The first conductive pattern is positioned to optimize light interaction, while the second conductive pattern is positioned to optimize electrostatic shielding. This dimensional arrangement resolves the contradiction by providing both functions simultaneously through spatial distribution.
3Productivity
If pixel filling rate is increased to improve detection efficiency, then detection efficiency is improved, but light transmittance deteriorates
Solution Approach 1:
The conductive patterns are designed with local quality differentiation where the first conductive pattern uses transparent materials to minimize light blocking, while still providing sufficient conductive function. This allows the pixel structure to achieve high filling rate with sensing elements while maintaining high light transmittance through the transparent conductive patterns, resolving the contradiction between detection efficiency and light transmittance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed design effectively reduces the occurrence of static Mura and image unevenness by shielding static electricity and maintaining high photoelectric response sensitivity, thereby enhancing the imaging quality and product yield.
Implementation Method 1
The conductive pattern has a hollow portion and a transparent conductive portion surrounding the hollow portion... providing electrostatic shielding
Implementation Method 2
An amorphous silicon (a-Si) X-ray flat panel detector... convert 'X-rays' invisible to the naked eyes into 'digital signals'
Data Source
AI summary
A sensing substrate and an electronic device are provided. The sensing substrate includes a sensing unit on a base substrate. The sensing unit includes a sensing element and a conductive pattern, the sensing element has a light incident surface and a back surface that are opposite and a side surface between the light incident surface and the back surface. The conductive pattern is on a side of the sensing element away from the base substrate, and has a hollow portion and a transparent conductive portion surrounding the hollow portion, an orthographic projection of the hollow portion on the base substrate is at least partially within an orthographic projection of the sensing element on the base substrate, and an orthographic projection of the transparent conductive portion on the base substrate at least partially overlaps with an orthographic projection of the side surface of the sensing element on the base substrate.


