Sensing Substrate Gas Current Vector Measurement
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Solution Overview
Problem
Current sensor technologies are insufficient for accurately measuring the distribution of gas current directions and speeds on the surface of a wafer in substrate processing, leading to potential deterioration in process uniformity during semiconductor manufacturing.
Innovation Solution
A data acquisition method using a sensing substrate with pairs of sensors configured to measure gas current vectors in different linear directions, allowing for precise calculation of gas current directions across multiple measurement regions on the substrate surface.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional single-sensor techniques are used, then device complexity is reduced, but measurement precision of gas current direction and speed distribution cannot be achieved
Solution Approach 1:
The sensing substrate is divided into multiple measurement regions, with each region containing a pair of sensors oriented in different linear directions. This segmentation allows independent measurement of gas current vector components in different directions, enabling precise determination of gas current direction and speed distribution across the substrate surface.
Solution Approach 2:
The invention transitions from single-direction sensor measurement to multi-directional vector measurement by arranging sensor pairs in different linear directions. This dimensional expansion from scalar to vector measurement enables comprehensive characterization of gas current flow patterns, including both magnitude and direction information.
2Manufacturing precision
If gas current distribution is not measured, then device complexity remains low, but process uniformity deteriorates
Solution Approach 1:
The invention replaces complex computational fluid dynamics simulations with direct physical measurement using sensor arrays. By substituting numerical simulation with empirical sensor data collection and vector combination, the system achieves accurate gas current characterization without requiring complex computational models.
Solution Approach 2:
The sensing substrate acts as an intermediary between the gas current flow and the measurement system. It provides a standardized platform that interfaces with the substrate processing apparatus, enabling non-intrusive measurement of gas current distribution while maintaining process conditions.
3Reliability
If simulation by computer is used to adjust gas currents, then measurement equipment is simplified, but measurement precision and reliability are insufficient
Solution Approach 1:
The sensor pairs provide direct feedback on gas current direction and speed at multiple locations on the substrate surface. This feedback mechanism enables real-time monitoring and adjustment of gas current distribution, allowing operators to optimize process parameters based on actual measurement data rather than relying solely on simulations.
Solution Approach 2:
The sensing substrate is prepared in advance with sensor pairs positioned at predetermined locations and orientations. This preliminary configuration ensures that when the substrate is introduced into the processing apparatus, measurement capability is immediately available without requiring complex real-time setup or calibration procedures.
Data Source
AI summary
A data acquisition method of a substrate processing apparatus for acquiring data on gas current directions in a plurality of measurement regions on a surface of a substrate, includes: loading a sensing substrate having a plurality of pairs of sensors on a loader, wherein each pair of sensors includes a first sensor and a second sensor configured to acquire vector data of the gas current on the surface of the sensing substrate; acquiring vector data of the gas current in a first linear direction by the first sensor; acquiring vector data of the gas current in a second linear direction slanted to the first linear direction by the second sensor; and combining the gas current vectors based on a starting point associated with the respective pair of sensors; and calculating a gas current direction from the starting point associated with the respective pair of sensors.