High Sampling Rate Sensor Buffering for Semiconductor Fault Diagnosis
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Solution Overview
Problem
Semiconductor processing systems face challenges in troubleshooting faults due to the loss of sensor information, which can be critical for diagnosing the cause of failures, as existing technologies do not effectively buffer data at high sampling rates.
Innovation Solution
Implementing a system with a buffer coupled to sensors that collects raw data at a high sampling rate and stores it temporarily before transferring it to a long-term storage device, ensuring that sensor information is available for fault diagnosis.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If sensor data is buffered at high sampling rates, then fault diagnosis capability is improved, but system complexity increases
Solution Approach 1:
A buffer device is introduced as an intermediary component between sensors and long-term storage to temporarily hold sensor data at high sampling rates. This buffer acts as a mediator that captures and preserves fault-related information without requiring the entire system to operate at high complexity, thereby improving fault diagnosis capability while managing system complexity.
2Loss of information
If high sampling rate data collection is implemented, then data quality for fault analysis is improved, but data loss occurs without proper buffering
Solution Approach 1:
The buffer performs preliminary action by pre-capturing and storing sensor data at high sampling rates before faults occur or before data is needed for analysis. This preliminary data collection ensures that critical fault information is preserved and available when needed, preventing information loss while maintaining efficient data collection workflows.
3Reliability
If continuous high-rate data collection is performed, then fault detection accuracy is improved, but storage requirements increase
Solution Approach 1:
The storage system is segmented into two distinct parts: a buffer for high-speed temporary storage of raw sensor data at high sampling rates, and long-term storage for archived data. This segmentation allows continuous high-rate data collection to be performed in the buffer without overwhelming the long-term storage system, thereby maintaining fault detection accuracy while managing storage volume through divided responsibility.
Data Source
AI summary
Embodiments of the invention are directed toward systems and/or methods that buffer data from various sensors with a high sampling rate in a semiconductor processing system. Such sampling can provide better data about the processing for diagnosing the conditions leading up to a processing fault in the system.