Sensor Charging Container With Driven Contact Pins

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Solution Overview

Problem

Current semiconductor processing systems lack an efficient and integrated solution for charging substrate-like sensors within a container that supports secure power supply and handling, which can lead to sensor damage and increased operational complexity.

Innovation Solution

A container with a main body, support structure, contact pins, and a drive mechanism for substrate-like sensors, allowing for secure accommodation, power supply, and charging without removing the sensor, utilizing a cover for sealing and a lifting mechanism for contact pin operation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If the substrate-like sensor is removed from the housing by a robot and transferred to a reference target, then the sensor can be charged externally, but the sensor is exposed to potential damage and the process becomes more complex

Engineering Contradiction:
ImproveCharging operationVSAvoidSensor safety
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The patent combines the charging function with the container housing by integrating contact pins and a drive mechanism directly into the housing structure. This allows the sensor to be charged in-situ without removal, eliminating the need for external handling while ensuring protected charging within the sealed environment.

Inventive Principle:
Principle #5Merging (Combining)

2Ease of operation

If the substrate-like sensor is removed from the housing by a robot and transferred to a reference target, then the sensor can be charged externally, but the device complexity increases

Engineering Contradiction:
ImproveCharging operationVSAvoidHandling system
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The patent merges the charging mechanism with the existing housing structure by integrating contact pins and a drive mechanism into the housing. This eliminates the need for separate external charging equipment and robotic handling, reducing overall system complexity while enabling charging functionality.

Inventive Principle:
Principle #5Merging (Combining)

3Ease of operation

If contact pins are provided inside the housing to charge the sensor, then charging can be performed without removal, but the contact pins may not reliably contact the terminal

Engineering Contradiction:
ImproveCharging operationVSAvoidElectrical contact
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The patent employs a drive mechanism that enables the contact pins to move dynamically. This allows the contact pins to adjust their position and apply sufficient pressure to ensure reliable electrical contact with the sensor terminal, while still allowing for easy insertion and removal of the sensor.

Inventive Principle:
Principle #15Dynamics

4Ease of operation

If the housing is opened to access the sensor, then the sensor can be removed for charging, but the sensor is exposed to contaminants

Engineering Contradiction:
ImproveCharging operationVSAvoidContamination
Core Design Contradiction:
Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The patent combines the charging function with the sealed housing structure, allowing charging to occur in-situ without opening the housing. This maintains the protective sealed environment, preventing contamination while enabling charging through integrated contact pins and drive mechanism.

Inventive Principle:
Principle #5Merging (Combining)

Data Source

PatentUS11984332B2Container and method for charging substrate-like sensor
Publication Date: 2024.05.14 TOKYO ELECTRON LTD
  • US11984332B2 patent drawing
  • US11984332B2 patent drawing
  • US11984332B2 patent drawing

AI summary

A container for a substrate-like sensor with a terminal includes a main body having an opening, and a support disposed in the main body and configured to support the substrate-like sensor. The container includes a contact pin disposed in the main body and configured to contact the terminal of the substrate-like sensor, and a drive mechanism configured to drive the contact pin. The container includes a jack disposed outside the main body and electrically connected to the contact pin, and a cover for allowing the opening of the main body to be closed.