Sensor Charging Container With Retractable Module to Avoid Robot Collision
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Solution Overview
Problem
The existing methods for exchanging focus rings in plasma etching processes are time-consuming and prone to particle contamination, and the charging of vision wafers is inefficient due to separate charging devices that can collide with transfer robots.
Innovation Solution
A container system with integrated charging modules that move substrate type sensors, including a guide part, support part, and driving part, to minimize collisions and optimize charging efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a separate charging part is provided for charging the vision wafer, then the vision wafer can be charged, but the charging part may collide with the transfer hand when it enters the container
Solution Approach 1:
The charging part is designed to move between a standby location and a charging location, transitioning from a static obstacle to a dynamic component that adapts its position based on operational needs, thereby avoiding collision with the transfer hand
Solution Approach 2:
The charging function is extracted from a separate stationary charging part and integrated into a movable charging module that can be positioned as needed, separating the charging function from the container structure itself
2Device complexity
If the charging part is stationary, then the structure is simple, but it collides with the transfer hand during operation
Solution Approach 1:
The charging part transforms from a stationary component to a movable one, enabling it to retract from the transfer path during hand operations while extending to perform charging, thus resolving the conflict between structural simplicity and operational ease
3Device complexity
If manual exchange of focus ring is performed, then the process is simple, but much work time is consumed and particle contamination risk increases
Solution Approach 1:
The transfer robot autonomously performs the focus ring exchange operation without human intervention, with the robot capable of removing used focus rings and installing new ones automatically, thereby eliminating manual labor while maintaining process simplicity
Solution Approach 2:
Focus rings are pre-prepared and staged for automatic installation by the transfer robot, allowing the exchange process to proceed without waiting for manual preparation, thus accelerating the overall exchange speed
4Device complexity
If manual exchange of focus ring is performed, then the equipment requirement is low, but particle contamination risk increases
Solution Approach 1:
The transfer robot autonomously performs focus ring exchange within the sealed container environment, eliminating the need for opening the container during exchange operations, thereby preventing particle contamination from external environments
Solution Approach 2:
The container maintains a controlled internal environment during automated focus ring exchange, isolating the process from external contaminants and ensuring particle-free operation throughout the exchange cycle
Data Source
AI summary
Disclosed is a container that receives a substrate type sensor. The container includes a body having a reception space, one side of which is opened, a door that selectively opens and closes the reception space, a shelf part that supports the substrate type sensor in the reception space, and a charging module that charges the substrate type sensor supported by the shelf part, and the charging module includes a charging part that moves between a standby location and a charging location that charges the substrate type sensor supported by the shelf part.