Sensor Chip Junction Adhesive Layer Thermal Stress Management

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Solution Overview

Problem

Temperature changes cause thermal stress between the sensor chip and the adhesive layer, leading to distortion and errors in pressure detection accuracy, which are exacerbated by the viscoelastic properties of the adhesive layer and the time it takes to reach equilibrium, affecting the efficiency of pressure sensor production.

Innovation Solution

A method to measure the characteristics of the adhesive layer in a sensor chip junction structure, allowing for the selection of an adhesive layer with optimal thickness and material properties to minimize thermal stress and improve detection accuracy, using a measurement apparatus that applies a controlled shearing force to determine the adhesive layer's properties and ensure accurate pressure detection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the adhesive layer thickness is increased to relax thermal stress and suppress temperature variations, then the sensor chip distortion is reduced, but the production time increases due to extended thermostatic chamber testing

Engineering Contradiction:
Improvepressure detection accuracyVSAvoidproduction time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The invention applies preliminary action by measuring adhesive layer characteristics (storage modulus, loss modulus, tan delta) before final assembly and using these measurements to predict thermal stress behavior. This allows selection of adhesive layers that will minimize distortion under temperature changes, eliminating the need for extended thermostatic chamber testing and reducing production time while maintaining reliability

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The invention changes parameters by transitioning from empirical adhesive selection to science-based selection using viscoelastic property measurements. By quantifying adhesive characteristics (storage modulus E', loss modulus E'', tan delta) and matching them to specific temperature ranges and sensor chip materials, the system optimizes thermal stress relaxation without requiring time-consuming post-assembly temperature cycling tests

Inventive Principle:
Principle #35Parameter changes

2Stability of the object's composition

If the adhesive layer thickness is increased to improve thermal stress relaxation, then the sensor output characteristic stability is improved, but the device complexity increases

Engineering Contradiction:
Improvesensor output characteristicVSAvoidadhesive layer configuration
Core Design Contradiction:
Stability of the object's compositionVSDevice complexity

Solution Approach 1:

The invention simplifies device complexity by replacing complex multi-layer adhesive configurations with a unified viscoelastic parameter-based selection approach. By measuring and matching storage modulus, loss modulus, and tan delta values to temperature ranges and sensor chip materials, the system achieves stable output characteristics without requiring complex adhesive layer designs

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention substitutes mechanical trial-and-error adhesive selection and testing with a scientific measurement and calculation system. By using dynamic mechanical analysis to measure adhesive properties and applying viscoelastic theory to predict thermal stress behavior, the system replaces complex mechanical assembly iterations with precise computational prediction, reducing overall device complexity

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Measurement precision

If the adhesive layer with optimal thickness is selected to minimize thermal stress, then the pressure detection accuracy is improved, but the measurement and selection process becomes more complex

Engineering Contradiction:
Improvepressure detection accuracyVSAvoidmeasurement apparatus
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The invention achieves universality by creating a measurement apparatus that can evaluate multiple adhesive layer candidates simultaneously using the same viscoelastic measurement protocol. The system measures storage modulus, loss modulus, and tan delta for different adhesives and thicknesses, then uses standardized calculations to predict thermal stress performance, enabling comprehensive evaluation without proportionally increasing complexity

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The invention replaces complex post-assembly thermal stress measurement and adjustment mechanisms with a pre-assembly viscoelastic property measurement system. By using dynamic mechanical analysis to characterize adhesives and applying viscoelastic theory to predict thermal behavior, the system achieves high measurement precision through relatively simple non-destructive testing equipment

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

4Reliability

If extensive thermostatic chamber testing is performed to ensure accuracy, then the reliability is improved, but the productivity decreases

Engineering Contradiction:
Improvepressure sensor accuracyVSAvoidproduction efficiency
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The invention performs preliminary measurement of adhesive viscoelastic properties before assembly, allowing prediction of thermal stress behavior and elimination of the need for extensive post-assembly thermostatic chamber testing. This preliminary characterization enables direct qualification of adhesive layers, maintaining reliability while dramatically improving productivity

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The invention creates a computational model that copies and predicts thermal stress behavior based on viscoelastic property measurements at room temperature. By using the measured storage modulus, loss modulus, and tan delta values to calculate expected thermal stress and distortion, the system replicates high-temperature performance characteristics without requiring actual high-temperature testing, thus maintaining reliability while improving production efficiency

Inventive Principle:
Principle #26Copying

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces the deviation in detection accuracy due to temperature changes and enhances production efficiency by allowing the sensor chip to meet predetermined accuracy ranges without the need for extensive thermostatic chamber testing, improving the reliability and speed of pressure sensor manufacturing.

Implementation Method 1

the viscoelastic properties of the adhesive layer, because it takes some time for the thermal stress to reach a state of equilibrium

Methodology Applied
Scientific EffectViscoelasticity: Viscoelasticity

Implementation Method 2

a thermal stress is generated between the sensor chip and the bottom wall portion based on differences among a coefficient of linear expansion

Methodology Applied
Scientific EffectHeat conduction: Conduction (thermal)

Data Source

PatentEP3644033B1Sensor chip junction structure and pressure sensor
Publication Date: 2022.09.07 SAGINOMIYA SEISAKUSHO INC
  • EP3644033B1 patent drawingFigure 1
  • EP3644033B1 patent drawingFigure 2A
  • EP3644033B1 patent drawingFigure 2B

AI summary

In a sensor chip junction structure, if a moving distance of a tip of a press jig (56) is any of 50 µm and 30 µm, for example, a characteristic line of a load (shearing force) (N) applied to an adhesive layer (50) formed on a glass pedestal and having a thickness set in a range from 0.3 mm to 2.5 mm is either located on any of a characteristic line Lt1 (y = 1.3889x3) and a characteristic line Lt2 (y = 0.463x3) or located in a region above zero and equal to or below any of the characteristic line Lt1 and the characteristic line Lt2.