Sensor Chip Lithographic Integration for CT Detectors

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current sensor chip production methods for computerized tomography detectors are costly due to the need for wafer-bonding and high contact costs, which also result in complex and expensive integration processes.

Innovation Solution

Lithographic integration of radiation detection elements and analog-digital converters on a single side of a crystalline base plate, with a through-contact for electrical connection between the sides, reducing the need for multiple base plates and simplifying the integration process.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If wafer-bonding method is used to integrate radiation detection elements and analog-digital converters, then integration is achieved, but production costs and material costs increase significantly

Engineering Contradiction:
Improveintegration processVSAvoidmaterial costs
Core Design Contradiction:
Ease of manufactureVSQuantity of substance

Solution Approach 1:

The patent combines the radiation detection element and the analog-digital converter components onto a single crystalline base plate using lithographic integration. This merging eliminates the need for separate wafer-bonding processes and reduces the number of base plates required, thereby lowering both production complexity and material costs while achieving complete integration of detection and conversion functions.

Inventive Principle:
Principle #5Merging (Combining)

2Adaptability or versatility

If multiple crystalline base plates are used and bonded together, then functional integration is achieved, but production complexity and costs increase

Engineering Contradiction:
Improvefunctional integrationVSAvoidproduction process
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent merges multiple functional components (radiation detection element, analog-digital converter, and associated circuits) onto a single crystalline base plate. This consolidation reduces the number of separate components and bonding interfaces required, simplifying the production process while maintaining complete functional integration across all necessary subsystems.

Inventive Principle:
Principle #5Merging (Combining)

3Measurement precision

If conventional sensor chip arrangement is used for high resolution, then pixel density increases, but installation space requirements increase

Engineering Contradiction:
Improvepixel densityVSAvoidinstallation space
Core Design Contradiction:
Measurement precisionVSArea of stationary object

Solution Approach 1:

The patent integrates the analog-digital converter directly onto the same crystalline base plate as the radiation detection element, eliminating the need for separate converter chips and their associated mounting space. This consolidation reduces the overall installation space required while maintaining high pixel density through efficient lateral arrangement of integrated sensor chips.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces material and production costs, enhances the robustness and service life of sensor chips, and optimizes installation space, allowing for more stable operation and efficient digital signal transmission in CT detectors.

Implementation Method 1

an element detecting radiation

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentUS9945966B2Production method of a sensor chip and computerized tomography detector
Publication Date: 2018.04.17 SIEMENS HEALTHINEERS AG
  • US9945966B2 patent drawing
  • US9945966B2 patent drawing
  • US9945966B2 patent drawing

AI summary

A sensor chip, in particular for computerized tomography detectors, including an analog-digital converter electrically connected to an element detecting radiation. A problem addressed is that of defining a sensor chip which is as cost-efficient and reliable as possible. According to an embodiment of the invention, only one single crystalline base plate is used, on which all required components of the sensor chip are applied. A through-contact between the conductor paths or the contacts of both sides of the base plate is used as applicable in order to connect the components of both sides to each other.