Sensor Coil Stacked on Semiconductor Element for Detection Accuracy
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Solution Overview
Problem
Current sensors that detect current using a coil face challenges in improving their characteristics, particularly in miniaturization and sensitivity, due to parasitic components on semiconductor substrates, which hinder efficient magnetic field passage and detection accuracy.
Innovation Solution
A sensor design featuring a coil stacked on a semiconductor element with a conductive member, where the coil is positioned around the conductive member in a plane crossing the base, allowing for efficient magnetic field detection and enhanced sensitivity, and includes a Rogowski coil configuration with electrode and conductive layers connected by members, along with an insulating and magnetic member to improve performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a coil is used to detect current on a semiconductor substrate, then current detection function is achieved, but parasitic components hinder magnetic field passage and reduce detection accuracy
Solution Approach 1:
The patent transitions from planar coil configurations to a three-dimensional stacked structure where the coil is positioned vertically above the semiconductor element. This dimensional change allows the magnetic field to pass through the coil more efficiently by eliminating parasitic components that would otherwise obstruct the magnetic field path in planar arrangements, thereby improving detection accuracy.
Solution Approach 2:
The sensor is divided into distinct functional layers: the semiconductor element layer and the coil layer. This segmentation separates the current generation function from the magnetic field detection function, allowing each component to be optimized independently. The coil is positioned around the conductive member in a plane crossing the vertical direction, creating clear spatial separation that reduces parasitic interference.
2Volume of moving object
If traditional coil configurations are used, then current detection is achieved, but sensor size cannot be reduced further
Solution Approach 1:
The coil is nested around the conductive member in a stacked configuration, with the coil positioned vertically above the semiconductor element. This nesting arrangement allows the detection function to be integrated within the same footprint as the semiconductor element, significantly reducing the overall sensor volume while maintaining reliable detection characteristics through efficient magnetic field coupling.
Solution Approach 2:
The patent utilizes the vertical dimension by stacking the coil above the semiconductor element rather than expanding laterally. This vertical integration reduces the sensor's planar footprint and overall volume while maintaining effective magnetic field detection, as the coil is positioned to capture the magnetic field generated by the conductive member in the vertical direction.
3Measurement precision
If coil is positioned around conductive member in plane crossing vertical direction, then magnetic field detection efficiency is improved, but structural complexity increases
Solution Approach 1:
The patent combines multiple functions into the stacked structure: the conductive member serves as both the electrical connection element and the magnetic field source, while the coil positioned around it performs both magnetic field detection and signal generation. This merging of functions achieves efficient magnetic field detection without requiring additional separate components, thereby limiting the increase in structural complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enables the creation of a smaller, more sensitive sensor with improved characteristics, allowing for efficient detection of current changes and reducing the influence of external magnetic fields, thereby enhancing detection accuracy and stability.
Implementation Method 1
an electric signal obtained from the coil is configured to change according to a current flowing through the first conductive member
Data Source
AI summary
According to one embodiment, a sensor includes a base, and a first structure body. The base includes semiconductor dement including the first dement electrode. The first structure body includes a first conductive member and a coil. The first conductive member is electrically connected with the first element electrode. The coil is provided around the first conductive member in a first plane crossing a first direction from the base to the first structure body.